Two-stage composite large-stroke high-precision rapid reflection mirror
A fast mirror, large stroke technology, applied in optical components, optics, instruments, etc., can solve problems such as difficult to break through structure and drive, and achieve the effect of reducing overall size and high response
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[0023] In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings.
[0024] Reference figure 1  ̄3 shows a two-stage composite large-stroke high-precision fast mirror in the embodiment of the present invention,
[0025] It includes a base 1, an intermediate platform 2, an output platform 3, a voice coil drive unit 4, a piezoelectric drive unit 5, a first flexible support 6, a second flexible support 7, and a third flexible support 8, wherein the intermediate platform 2 is provided There is a through hole 201, the voice coil driving part 4 includes a voice coil motor 401, a flexible translation pair 402 and a first flexible hinge 403, and the piezoelectric driving part 5 includes a piezoelectric driver 501, a piezoelectric mounting seat 502 and a second flexible hinge 503.
[0026] The two ends of the first flexible support 6 and the sec...
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