A temperature control algorithm for semiconductor temperature control device

Abstract

The invention discloses a temperature control algorithm for a semiconductor temperature control device, and relates to the field of the temperature control. The temperature control algorithm comprisesa refrigeration system and a circulating system; the refrigeration system is used for controlling temperature, the circulating system is used for liquid circulation, so that the temperature control precision of the equipment is greatly improved, the no-load state is within + / -0.1 DEG C, and the loading state is within + / -1 DEG C, and the energy consumption of the equipment is obviously reduced; the heating quantity output is in a low range in the no-load and load states, the internal energy loss in the equipment is less, and the energy consumption is reduced; and the temperature control algorithm is compatible with different flows and simple in program structure. By being compatible with different flows, the energy consumption of the equipment is reduced, and the temperature control precision is further improved.

Description

Technical field [0001] The invention relates to the field of temperature control, in particular to a temperature control algorithm used in a semiconductor temperature control device. Background technique [0002] As an auxiliary equipment for semiconductor production, semiconductor temperature control devices are required to maintain a constant temperature output during the wafer manufacturing process and require high accuracy. [0003] The equipment is mainly refrigerated in the actual process, so the temperature control accuracy of the refrigeration system in the equipment is very important. [0004] At present, the temperature control of the system uses PID algorithm to control the target temperature to be consistent with the given temperature. The accuracy of temperature control cannot be guaranteed when the load fluctuates. At the same time, the energy consumption during no-load and loading cannot be taken into account, resulting in large internal energy loss in the equipment, a...

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Problems solved by technology

[0004] At present, the temperature control of the system is to control the target temperature to be consistent with the given temperature through the PID algorithm. The temperature control accuracy cannot be guaranteed when the load fluctuates, and at the same time, it cannot take into account the energy consumption during no-load and loading, resulting in a large internal energy loss of the equipment, and Difficult to be compatible with different traffic conditions

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