Vacuum adsorption door suction device

Abstract

The invention discloses a vacuum adsorption door suction device comprising a cylinder block and a vacuum suction cup connected to the cylinder block. The cylinder block is internally provided with anelastic reset piece extending to the exterior of the vacuum suction cup, the cylinder block is provided with a first through hole used for connecting with a vacuum source and a second through hole used for connecting with the vacuum suction cup, and the elastic reset piece is provided with a third through hole; when the elastic reset piece is compressed, the first through hole and the second through hole in the cylinder block communicate with the third through hole in the elastic reset piece, and the vacuum suction cup generates adsorption force; and when the elastic reset piece is reset, thefirst through hole and the second through hole in the cylinder block are disconnected from the third through hole in the elastic reset piece, and the vacuum suction cup releases the adsorption force.The vacuum adsorption mode of the vacuum adsorption door suction device does not have electromagnetic interference problems, and cables do not need to be arranged in an active area of a door. When thedoor is opened or closed, the vacuum release or vacuum adsorption process exists, the problem of possible vibration or collision is reduced, and the problem of particle contamination generated in theprocess of opening and closing the door can be effectively avoided.

Description

technical field [0001] The invention relates to a door suction device, in particular to a vacuum adsorption door suction device. Background technique [0002] There are many doors with different functions in large-scale chemical mechanical polishing CMP equipment, and there are different requirements for the adsorption method or locking method of the door, such as easy to open at any time for maintenance, strictly prohibited to open during equipment operation, cleanliness and sealing requirements, etc. . [0003] In the design of the door, it may be necessary to adopt different adsorption or locking methods according to different requirements, such as electromagnetic, mechanical, magnetic, etc. Electromagnetic door locks are mostly used in the process operation area, which can be opened only through the software control system; magnet adsorption or mechanical switches are mostly used in the maintenance area, which is convenient to open for maintenance at any time; some dang...

AI Technical Summary

Problems solved by technology

[0005] A large number of electromagnetic door locks are used in CMP equipment, which is more likely to cause electromagnetic signal interference, and too much wiring in the active door area is likely to cause cable damage, leakage, etc.

[0006] Mechanical switches or door locks will produce collisions between metals during each switch process, which is prone to produce particles or other impurities, which may easily cause wafer pollution in the post-cleaning area with high cleanliness requirements, resulting in certain economic losses

[0007] The adsorption force of the magnetic switch is generally not adjustable. If the magnetic force is too large, it will not be easy to open. If the magnetic force is too small, the adsorption performance cannot meet the requirements.

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