Vacuum adsorption door suction device

A technology of vacuum adsorption and vacuum suction cups, which is applied in the direction of door/window accessories, wing leaf parts, building fastening devices, etc., which can solve the problems of economic loss, difficulty in opening, and easy generation of particles or other impurities, so as to avoid particle pollution , Improve the effect of safety and reliability

Active Publication Date: 2019-09-03
BEIJING SEMICON EQUIP INST THE 45TH RES INST OF CETC
View PDF6 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] A large number of electromagnetic door locks are used in CMP equipment, which is more likely to cause electromagnetic signal interference, and too much wiring in the active door area is likely to cause cable damage, leakage, etc.
[0006] Mechanical switches or door locks will produce collisions between metals during each switch process, which is prone to produce particles or other impurities, which may easily cause wafer pollution in the post-cleaning area with high cleanliness requirements, resulting in certain economic losses
[0007] The adsorption force of the magnetic switch is generally not adjustable. If the magnetic force is too large, it will not be easy to open. If the magnetic force is too small, the adsorption performance cannot meet the requirements.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Vacuum adsorption door suction device
  • Vacuum adsorption door suction device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] figure 1 It is a schematic diagram of the adsorption state structure of the vacuum adsorption door suction device provided by Embodiment 1 of the present invention; figure 2 It is a schematic structural diagram of the release state of the vacuum adsorption door suction device provided in Embodiment 1 of the present invention; Figure 1-Figure 2 As shown, the vacuum adsorption door suction device provided by Embodiment 1 of the present invention includes a cylinder body 1 and a vacuum suction cup 2 connected to the cylinder body 1. The elastic return member 3, the cylinder body 1 is provided with a first through hole 11 for connecting to a vacuum source and a second through hole 12 for connecting with the vacuum chuck 2, and the elastic return member 3 is provided with a first through hole 11 for connecting to a vacuum source. Three through hole 31, also comprises door body 4, wherein:

[0034] When the elastic reset member 3 is compressed, the first through hole 11 a...

Embodiment 2

[0041] The vacuum suction door suction device provided in the second embodiment is a further improvement on the vacuum suction door suction device provided in the first embodiment. Figure 1-Figure 2 Based on the above, the vacuum adsorption door suction device provided in the second embodiment includes a cylinder body 1 and a vacuum suction cup 2 connected to the cylinder body 1, and a vacuum suction cup extending to the outside of the vacuum suction cup 2 is installed in the cylinder body 1. The elastic return member 3, the cylinder body 1 is provided with a first through hole 11 for connecting to a vacuum source and a second through hole 12 for connecting with the vacuum chuck 2, and the elastic return member 3 is provided with a first through hole 11 for connecting to a vacuum source. Three through hole 31, also comprises door body 4, wherein:

[0042] When the elastic reset member 3 is compressed, the first through hole 11 and the second through hole 12 on the cylinder bo...

Embodiment 3

[0051] The vacuum adsorption door suction device provided in the third embodiment is a further improvement on the vacuum adsorption door suction device provided in the first embodiment. Figure 1-Figure 2 Based on the above, the vacuum adsorption door suction device provided in the third embodiment includes a cylinder body 1 and a vacuum suction cup 2 connected to the cylinder body 1, and a vacuum suction cup extending to the outside of the vacuum suction cup 2 is installed in the cylinder body 1. The elastic return member 3, the cylinder body 1 is provided with a first through hole 11 for connecting to a vacuum source and a second through hole 12 for connecting with the vacuum chuck 2, and the elastic return member 3 is provided with a first through hole 11 for connecting to a vacuum source. Three through hole 31, also comprises door body 4, wherein:

[0052] When the elastic reset member 3 is compressed, the first through hole 11 and the second through hole 12 on the cylinde...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a vacuum adsorption door suction device comprising a cylinder block and a vacuum suction cup connected to the cylinder block. The cylinder block is internally provided with anelastic reset piece extending to the exterior of the vacuum suction cup, the cylinder block is provided with a first through hole used for connecting with a vacuum source and a second through hole used for connecting with the vacuum suction cup, and the elastic reset piece is provided with a third through hole; when the elastic reset piece is compressed, the first through hole and the second through hole in the cylinder block communicate with the third through hole in the elastic reset piece, and the vacuum suction cup generates adsorption force; and when the elastic reset piece is reset, thefirst through hole and the second through hole in the cylinder block are disconnected from the third through hole in the elastic reset piece, and the vacuum suction cup releases the adsorption force.The vacuum adsorption mode of the vacuum adsorption door suction device does not have electromagnetic interference problems, and cables do not need to be arranged in an active area of a door. When thedoor is opened or closed, the vacuum release or vacuum adsorption process exists, the problem of possible vibration or collision is reduced, and the problem of particle contamination generated in theprocess of opening and closing the door can be effectively avoided.

Description

technical field [0001] The invention relates to a door suction device, in particular to a vacuum adsorption door suction device. Background technique [0002] There are many doors with different functions in large-scale chemical mechanical polishing CMP equipment, and there are different requirements for the adsorption method or locking method of the door, such as easy to open at any time for maintenance, strictly prohibited to open during equipment operation, cleanliness and sealing requirements, etc. . [0003] In the design of the door, it may be necessary to adopt different adsorption or locking methods according to different requirements, such as electromagnetic, mechanical, magnetic, etc. Electromagnetic door locks are mostly used in the process operation area, which can be opened only through the software control system; magnet adsorption or mechanical switches are mostly used in the maintenance area, which is convenient to open for maintenance at any time; some dang...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & AuthorityApplications(China)
IPC IPC(8): E05C17/52
CPCE05C17/525E05Y2900/132
Inventor赵宁张志军李玉敏
OwnerBEIJING SEMICON EQUIP INST THE 45TH RES INST OF CETC