Electromagnetic balanced type force sensor based on optical lever and electronic balance
A force sensor and electronic balance technology, applied in the field of sensors, can solve problems such as the gap between the consistency and reliability of electronic balances, and achieve the effects of improving sensitivity, high displacement detection accuracy, and improving sensitivity
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[0042] image 3 Shown is an embodiment of the optical lever-based electromagnetic balance force sensor of the present invention, the optical lever-based electromagnetic balance force sensor includes an optical lever, a PSD element 25, an electromagnetic coil 11 and a closed-loop detection system.
[0043] The optical lever is used to generate light beams and reflect the light beams onto the PSD element 25;
[0044] The PSD element 25 is used to detect the displacement reflected by the light lever to the light spot 26 on the PSD element 25;
[0045] The PSD element 25 is connected with a closed-loop detection system, and the closed-loop detection system is connected with the electromagnetic coil 11 .
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