X-ray detection device based on five-axis movement platform

A motion platform and detection device technology, applied in the direction of using radiation for material analysis, etc., can solve the problems of poor stability, difficult scanning detection at large tilt angles, structural limitations, etc., to improve resolution imaging, improve detail resolution, and high stability. Effect

Active Publication Date: 2019-09-10
CHINA ELECTRONIC TECH GRP CORP NO 38 RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The technical problem to be solved by the present invention is: the mounting stability of the stage of the existing X-ray detection device is poor; and the stability of th

Method used

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  • X-ray detection device based on five-axis movement platform
  • X-ray detection device based on five-axis movement platform
  • X-ray detection device based on five-axis movement platform

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0047] Such as figure 1 , figure 2 As shown, this embodiment discloses an X-ray detection device based on a five-axis motion platform, including a lead room 1, a five-axis motion platform 2, an installation assembly 4, an X-ray source assembly 5, a detector 6, and a motion control room 7 and the ray source control room 8; the five-axis motion platform 2 is arranged inside the lead room 1, and the five-axis motion platform 2 includes a rigid frame 21, a three-axis linear motion mechanism 22, a two-axis rotary motion mechanism 23 and a support assembly 24. The rigid frame 21 is a hollowed out square frame structure, the three-axis linear motion mechanism 22 is fixed on the inner bottom of the rigid frame 21 through the support assembly 24, and the two-axis rotary motion mechanism 23 is fixed on the The inner top of the rigid frame 21; the X-ray source assembly 5 is fixed on the three-axis linear motion mechanism 22, and the detector 6 is fixed on the two-axis rotary motion mec...

Embodiment 2

[0065] Such as figure 2 , Figure 4 , Figure 12As shown, the difference between this embodiment and the first embodiment is that a sliding mechanism 3 is also provided on the frame body of the rigid frame 21, and the upper surface, the side surface and the lower surface of the frame body of the rigid frame 21 are all passed through the sliding mechanism. Mechanism 3 is movably connected with the inner side wall of the lead room 1; the sliding mechanism 3 includes support wheels 31, travel wheels 32, side guide wheels 33, upper guide wheels 34 and guide grooves 35; the support wheels 31, travel wheels 32 , side guide wheel 33, upper guide wheel 34, guide groove 35 are all provided with two; Two described support wheels 31 are respectively fixed on the top front side of described motion control chamber 7 and the top front side of ray source control chamber 8 , the supporting wheels 31 are slidingly matched with the left and right sides of the bottom of the rigid frame 21; T...

Embodiment 3

[0068] Such as image 3 , Figure 5 , Figure 13 As shown, the difference between this embodiment and the first embodiment is that the rigid frame 21 is welded by structural steel and steel plate, and a vertical support plate 241 is arranged below it, and a pair of Z-axis guide rails are arranged on the vertical support plate 241. surface and Z-axis screw bearing mounting surface, there is a weight-reducing hole on the vertical support plate 241; a rotary support plate 211 is arranged above the rigid frame 21, and is rigidly connected with the upper mounting plate 2311 of the two-axis rotary motion mechanism 23, vertically The straight support plate 241 is welded on the lower side of the rigid frame 21, and the auxiliary vertical support plate 246 is installed on the other side below the rigid frame 21, parallel to the vertical support plate 241, and the vertical support plate 241 is connected to the vertical auxiliary support plate. There is a space between 246 for the inst...

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Abstract

The invention discloses an X-ray detection device based on a five-axis movement platform. The X-ray detection device based on the five-axis movement platform includes a lead room, the five-axis movement platform, an installation assembly, an X-ray source assembly, a detector, a movement control room and a ray source control room; the five-axis movement platform is arranged in the lead room and includes a rigid frame, a three-axis linear movement mechanism, a two-axis rotary movement mechanism and a supporting assembly, the three-axis linear movement mechanism is fixed at the bottom end of theinner part of the rigid frame through the supporting assembly, and the two-axis rotary movement mechanism is fixed at the top end of the inner part of the rigid frame; the X-ray source assembly is fixed on the three-axis linear movement mechanism, and the detector is fixed on the two-axis rotary movement mechanism; and the movement control room and the ray source control room are correspondingly arranged at the two ends of the bottom face of the inner part of the lead room. By arranging the rigid frame and the supporting assembly, the three-axis linear movement mechanism and the two-axis rotary movement mechanism can keep stable, by using the installation assembly, the rigid frame is fixed in the lead room, and thus the whole five-axis movement platform can keep stable.

Description

technical field [0001] The invention relates to the field of X-ray detection devices, in particular to an X-ray detection device based on a five-axis motion platform. Background technique [0002] The X-ray inspection device is mainly oriented to the reliability inspection of integrated circuit packaging, inspecting the circuit and its packaging to check the existence of defects so as to determine the cause of the defects. When imaging at a higher magnification, reducing the X-ray source to the smallest possible light spot can make the edge definition of the image higher and improve the X-ray recognition ability. However, at very small spots, the stability of the X-ray inspection setup seriously affects the edge definition at higher magnifications. The development of integrated circuit technology has put forward three requirements for X-ray detection devices: 1) high stability of the motion platform to improve detail resolution; 2) multi-axis motion, which allows the relati...

Claims

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Application Information

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IPC IPC(8): G01N23/04
CPCG01N23/04
Inventor 张腊梅何张强李旺刘华荣张根烜时宇航徐非骏周杨王鹏陈帝江胡祥涛盛文军
Owner CHINA ELECTRONIC TECH GRP CORP NO 38 RES INST
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