A deterministic quantum light source device based on a gold reflective layer combined with a microlens, its preparation method and application
A technology of microlenses and reflective layers, applied in optical components, instruments, optics, etc., can solve the problems of high contrast of electronic glue and difficulty in preparing microlens masks.
Active Publication Date: 2021-05-25
SUN YAT SEN UNIV
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Problems solved by technology
[0007] However, no controllable microlens array based on the combination of gold reflective layer has been reported yet. The difficulty is that the contrast of the electron gel on the gold reflective layer is too high, and it is difficult to prepare a microlens mask by traditional 3D EBL exposure.
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Embodiment 1
[0039] A deterministic quantum light source device based on a gold reflective layer combined with a microlens, the specific preparation process is as follows figure 1 Shown, where 1 is GaAs substrate, 2 is Al 0.95 Ga 0.05 As sacrificial layer, 3 is Al x Ga 1-x As (0≤x≤0.4) layer, 4 is SiO 2 layer, 5 is the gold reflective layer, 6 is the quantum dot, 7 is the glass substrate, 8 is the UV curing adhesive, 9 is the gold mark, 10 is the cylindrical mask, 11 is the Al containing quantum dot x Ga 1-x As microlenses.
[0040] The specific preparation process is:
[0041] (1) if figure 1 a, 300nm~1000nm Al is sequentially grown on GaAs substrate 1 from bottom to top by molecular beam epitaxy 0.95 Ga 0.05 As sacrificial layer 2, 300nm~2000nm Al x Ga 1-x As (0≤x≤0.4) layer 3, InAs / GaAs quantum dots or GaAs / AlGaAs quantum dots 6 are embedded in Al during growth x Ga 1-x As (0≤x≤0.4) layer; then grow 10nm~30nm SiO by PECVD method 2 Layer 4, and finally vapor-deposit 50nm~20...
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Abstract
The invention discloses a deterministic quantum light source device based on a gold reflective layer combined with a microlens, a preparation method and an application thereof. The deterministic quantum light source device is the reflective layer gold, SiO 2 layer and microlens array; wherein the quantum dots are in the microlenses. The diameter of the bottom circular section of the microlens in the deterministic quantum light source device is 200nm to 3μm, and gold is used as a mirror, combined with the microlens to greatly improve the fluorescence extraction efficiency and bandwidth. When NA=1, the fluorescence extraction efficiency is as high as 90 %, the bandwidth can reach 100nm; it has great potential application value in electric pumping high-speed emission quantum dot single photon source and bonding with piezoelectric ceramics to produce high-efficiency cascade emission of entangled photon pairs; in the preparation method, using The method of heating the electron glue realizes the production of the microlens mask on the gold reflective layer. At the same time, the deterministic coupling between a single quantum dot and the GaAs microlens is realized by positioning the fluorescence imaging and overlaying high-precision electron beam exposure. The method is flexible, simple, and can be Large area preparation.
Description
technical field [0001] The invention relates to the technical fields of semiconductor technology, quantum computing and quantum information processing device manufacturing technology, and more specifically, to a deterministic quantum light source device based on a gold reflective layer combined with a microlens, its preparation method and application. Background technique [0002] Photon, as a good information carrier, is not only used in classical optical communication, but also plays a unique role in the field of quantum information. As the basic unit of the quantized electromagnetic field, a single photon has degrees of freedom such as polarization, momentum, orbital angular momentum, and time, and can be used to encode quantum information (qubits). At the same time, its interaction with the environment is very weak, and it can maintain coherent properties for a long time, ensuring that the quantum information it carries is not lost, and is very suitable for long-distance...
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IPC IPC(8): G02B27/00
CPCG02B27/00
Inventor 周丽丹杨家炜喻颖余思远
Owner SUN YAT SEN UNIV