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Method for preparing metal micro-nano array electrode by using ZnO crystal as template

An array electrode, micro-nano technology, applied in the manufacture of micro-structure devices, metal material coating technology, micro-structure technology, etc., can solve the problems of not appearing, preparing micro-nano array electrodes, etc.

Inactive Publication Date: 2013-04-17
LIAOCHENG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] At present, there is no method to use a certain crystal as a model to prepare micro-nano array electrodes

Method used

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  • Method for preparing metal micro-nano array electrode by using ZnO crystal as template
  • Method for preparing metal micro-nano array electrode by using ZnO crystal as template
  • Method for preparing metal micro-nano array electrode by using ZnO crystal as template

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] Example 1: Preparation of Ni micro-nano array electrodes with hexagonal prisms.

[0036] Preparation of ZnO crystal array with hexagonal column shape: ZnO is electrodeposited on ITO (indium tin oxide) / glass substrate. First, clean the ITO / glass with ethanol, acetone, and 1M NaOH respectively for 10 minutes; then configure the solution and prepare 20ml of 5×10 -4 M zinc acetate, add 0.164g sodium acetate to it and mix well. Using a three-electrode system (ITO as the working electrode, Pt as the counter electrode, and Ag / AgCl electrode as the reference electrode), set the potential at -0.95V, the temperature at 75°C, and electrodeposition for 45 minutes to obtain ZnO micro-nano arrays. Such as figure 1 shown.

[0037] Preparation of the template: Spin a layer of photoresist S1805 on the ZnO micro-nano array with a glue spinner at 1000 rpm, and heat-treat at 90°C for 60 minutes to stabilize the photoresist. Then immerse in the corresponding photoresist treatment soluti...

Embodiment 2

[0040] Embodiment 2: Preparation of hexagonal prism-shaped Co crystal micro-nano array electrode: use the same method in Example 1 to prepare a template, and measure 10ml of Co(NO) containing 132g per liter. 3 ) 2 ·6H 2 O, 25gH 3 BO 3 In the mixed solution, use a three-electrode system (the template is the working electrode, Pt is the counter electrode, and the Ag / AgCl electrode is the reference electrode), set the deposition potential to -0.9V, electrodeposit for 1-20min, and then immerse in the degumming solution ethanol 2-30min to remove the photoresist.

Embodiment 3

[0041] Example 3: Preparation of hexagonal Bi micro-nano array electrode: use the same method in Example 1 to prepare a template, and get 0.005M Bi 2 (NO 3 ) 2 Solution 0.4ml, add 6ml of acetic acid / sodium acetate buffer solution, use three-electrode system (template as working electrode, Pt as counter electrode, Ag / AgCl electrode as reference electrode), set deposition potential -0.7V, electrodeposition for 30min, Then immerse in ethanol for 2-30min to remove the photoresist.

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Abstract

The invention provides a method for preparing a metal micro-nano array electrode by using a ZnO crystal as a template. The method employs a ZnO crystal array as the template and comprises the steps of submerging the template by photoresist, dissolving ZnO away after the photoresist is stabilized, and electrodepositing the metal crystal in holes formed by dissolving ZnO away. The obtained metal crystal has ZnO morphology, being in hexagonal prism shapes.

Description

technical field [0001] The invention belongs to the technical field of micro-electrode production, in particular to a method for preparing a metal micro-nano array electrode with a certain shape by using ZnO crystal as a model. Background technique [0002] As early as the 1960s, microelectrode technology attracted widespread attention from scholars due to its excellent electrochemical properties, and became the frontier field and research hotspot of electrochemistry and electroanalytical chemistry in the late 1970s. When the one-dimensional size of the electrode is reduced from millimeters to microns, it shows many excellent electrochemical characteristics that cannot be compared with conventional electrodes, such as fast mass transfer, rapid steady state current, high current density, low resistance, and small time constant. . Micro-electrodes are small in size and suitable for micro-system and living body detection. When the size of the electrode is further reduced to t...

Claims

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Application Information

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IPC IPC(8): B81C1/00C25D9/04C25D5/54C25D5/02G01N27/30
Inventor 刘继锋孟凡军
Owner LIAOCHENG UNIV
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