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A self-calibration method for phase error

A phase error and self-correction technology, applied in instruments, measurement devices, optical devices, etc., can solve the problems of reduced measurement efficiency and doubled projection fringes.

Active Publication Date: 2021-04-02
XIAN UNIV OF TECH
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Problems solved by technology

[0005] In order to overcome the deficiencies of the above-mentioned prior art, the purpose of the present invention is to provide a self-correction method for phase error, solve the problems in the prior art that the projection fringes need to be doubled, and the measurement efficiency is reduced, and reduce the problem caused by the non-sinusoidal nature of the grating fringes. The phase error does not need to add any grating stripes, and the measurement efficiency is greatly improved

Method used

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  • A self-calibration method for phase error
  • A self-calibration method for phase error
  • A self-calibration method for phase error

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Embodiment Construction

[0058] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0059] The present invention proposes an error self-correcting phase shift profilometry for the first time, which converts the initial wrapping phase into the second wrapping phase, and fuses the initial and second wrapping phases to reduce the phase error. Without increasing the number of projected fringes, the measurement accuracy of this method is close to that of the two-step phase-shift algorithm, and at the same time, the measurement time is greatly shortened and the measurement efficiency is improved.

[0060] The method of the present invention comprises the following steps:

[0061] Phase Error Analysis Caused by Nonsinusoidal Grating Stripes

[0062] When performing three-dimensional measurement on a flat plane, under the ideal condition that the measurement system has no nonlinear error, the wrapping phase (without considering the...

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Abstract

The invention relates to a self-correcting method of phase error, and the method comprises the following steps: Step 1, calculating a period PT; Step 2, calculating the improved combined parcel phase;and the problems that projection stripes need to be doubled and measurement efficiency is reduced in the prior art are solved, phase errors caused by non-sine of grating stripes are reduced, no grating stripes need to be added, and measurement efficiency is greatly improved.

Description

technical field [0001] The invention belongs to the technical field of grating projection three-dimensional measurement, and in particular relates to a phase error self-correction method, which is used for self-correction of the phase error caused by the non-sinusoidality of grating stripes in phase shift profilometry. Background technique [0002] The phase shifting method has high precision and is insensitive to the environment and noise, but requires at least three or more fringes. Therefore, it is widely used in the three-dimensional measurement of static objects. Although the phase shift method has good measurement accuracy and robustness, there may still be some error sources: such as the phase shift error of the phase shift mechanism, the random noise of the grating image, and the desinusoidalization of the grating image, etc., may cause the phase error to increase. produce. (a) The phase shift error of the phase shift mechanism is caused by the unequal phase shift s...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/25
CPCG01B11/2504
Inventor 杨延西王建华张申华邓毅高异
Owner XIAN UNIV OF TECH
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