The invention relates to a large-bandwidth integrated
optical beam splitter based on a sub-
wavelength grating and a preparation method of the large-bandwidth integrated
optical beam splitter, and belongs to the technical field of integrated photonic devices and semiconductors. The large-bandwidth integrated
optical beam splitter comprises a substrate, a first cladding, a
waveguide layer, a glass layer and a second cladding, the substrate, the first cladding, the
waveguide layer, the glass layer and the second cladding are sequentially arranged from bottom to top, the
waveguide layer is arranged in the glass layer, and the waveguide layer is connected with the upper surface of the first cladding; the optical
beam splitter provided by the invention can achieve the effects of low
insertion loss, uniform light splitting and low
phase error in a large bandwidth range; the gaps in the
grating structure of the waveguide layer can be stably filled by the glass layer formed by spin-
coating the glass
reagent, air gaps are prevented from occurring when the gaps in the
grating structure are filled, the manufacturing reliability of the
beam splitter is improved, and the optical
beam splitter can be suitable for large-scale optical calculation and optical
interconnection scenes.