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Method for calibrating sub-pixel size of surface particulate pollutant of large-diameter reflector

A large-diameter mirror and surface particle technology, applied in the field of engineering optics, can solve the problem of low precision, achieve the effect of improving calibration precision and meeting cleanliness testing

Active Publication Date: 2019-10-29
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to solve the problem of low accuracy of the existing pixel-level size calibration method, and propose a sub-pixel size calibration method for large-aperture mirror surface particle pollutants

Method used

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  • Method for calibrating sub-pixel size of surface particulate pollutant of large-diameter reflector
  • Method for calibrating sub-pixel size of surface particulate pollutant of large-diameter reflector
  • Method for calibrating sub-pixel size of surface particulate pollutant of large-diameter reflector

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specific Embodiment approach 1

[0038] Specific implementation mode 1: In this implementation mode, the specific process of a sub-pixel size calibration method for particle pollutants on the surface of a large-aperture mirror is as follows:

[0039] For the detection of particle pollutants on the surface of large-aperture mirrors, the detection method of dark field imaging is adopted. The high-brightness linear array light source is installed on both sides of the front surface of the mirror, and irradiates on both sides of the mirror at a low angle. The mirror surface, the imaging system is installed on the front surface of the mirror and facing the mirror surface. If there are particle pollutants on the surface of the mirror, the reflected light of the particle pollutants will be incident on the photosensitive element of the imaging system, while the light in other areas cannot enter the imaging system, thus forming a bright object image under a dark background, the control system Image processing can be pe...

specific Embodiment approach 2

[0047] Specific embodiment 2: The difference between this embodiment and specific embodiment 1 is that in the first step, the entire light-transmitting area is divided into 4×4 sub-areas, and a calibration plate with the same size as the sub-area is prepared, and the calibration plate Silica particles of different sizes are preset on the top; the specific process is:

[0048] Step 11, using a pure black opaque plexiglass plate to make a calibration plate with the same size as the sub-area to reduce the impact of stray light on the size calibration results of particle pollutants;

[0049] Step 12. Make the calibration plate generate static electricity by friction, etc., and use different sizes of SiO 2 The particles are evenly sprinkled on the surface of the calibration plate, and the static electricity of the calibration plate will adsorb SiO 2 Granular, guaranteed SiO 2 The particle position does not change.

[0050] Other steps and parameters are the same as those in Embo...

specific Embodiment approach 3

[0051] Specific embodiment 3: The difference between this embodiment and specific embodiment 1 or 2 is that in the step 2, the calibration plates are sequentially placed on different sub-regions that are evenly divided on the surface of the mirror, and the calibration plates in different areas are collected respectively Picture; the specific process is:

[0052] Step 21. Install the large-diameter reflector on the offline dark field detection device (the offline dark field detection device includes an outer frame, a reflector, a light source unit, a guide rail and an image monitoring unit. This offline dark field monitoring device can obtain different monitoring distances Monitoring images of particulate contamination on the surface of the lower reflector, such as Figure 8 ), and use the clamping device to pre-tighten;

[0053] The aperture of the commonly used optical element is within 100mm, but the aperture of the optical element used in this paper is more than 600mm, so ...

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Abstract

A method for calibrating the sub-pixel size of the surface particulate pollutant of a large-diameter reflector is provided. The object of the present invention is to solve the low precision of a conventional pixel-level size calibration method. The method comprises the steps of 1, dividing an entire light-passing area into 4*4 sub-areas, producing a calibration plate having the same size as each sub-area, and disposing silica particles of different sizes on the calibration plate; 2, successively placing the calibration plate on different sub-areas evenly determined on the surface of the reflector, and separately collecting the calibration plate images in different sub-areas; 3, obtaining the position coordinates, the pixel area, the pixel diameter, and the total grayscale information of the particulate pollutant in the images; 4, measuring the actual diameter and the actual area of the particulate pollutant by a super depth-of-field microscope; and 5, training a pollutant area and diameter calibration model, and estimating a test sample by the trained pollutant area and diameter calibration model. The method is used in the field of surface particulate pollutant sub-pixel size calibration.

Description

technical field [0001] The invention relates to a method for calibrating the sub-pixel size of particle pollutants on the surface of a mirror. The invention belongs to the field of engineering optics. Background technique [0002] The main driving device of laser inertial confinement fusion is a high-power solid-state laser device. The transmission mirror in the device mainly plays the role of changing the direction of the laser beam, and is one of the important optical components in the process of laser beam transmission. Due to the huge laser energy required for fusion ignition, there is a high requirement for the cleanliness of the mirror surface. However, during the transportation, installation, and operation of the mirror, particle pollutants will be adsorbed on the surface of the component, which will cause scattering effects, thermal effects, field effects, etc. on the laser beam, and ultimately affect the quality of the laser beam. Therefore, it is necessary to crys...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N15/02
CPCG01N15/0227G01N15/0211
Inventor 陈明君赵林杰张德志程健蒋晓东尹朝阳苗心向牛龙飞吕海兵刘昊
Owner HARBIN INST OF TECH
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