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Holding device and optical apparatus

A technology for holding devices and optical devices, which is applied in the directions of optics, optical components, and exposure devices for photolithography, and can solve problems such as unfavorable costs

Active Publication Date: 2019-11-05
CANON KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In some cases, low thermal expansion materials such as invar alloys and ceramics are used in order to reduce positional deviation, but it is disadvantageous in terms of cost when large-scale parts are made of low thermal expansion materials

Method used

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  • Holding device and optical apparatus
  • Holding device and optical apparatus
  • Holding device and optical apparatus

Examples

Experimental program
Comparison scheme
Effect test

no. 1 Embodiment approach ＞

[0025] FIG. 1( a ) and FIG. 1( b ) are diagrams showing the configuration of a holding device 100 in the first embodiment. The holding device 100 is a holding device that holds an object 101 to be held within an allowable range even if a thermal load is generated and a positional shift occurs. In addition, in this specification and drawings, the direction is shown in the XYZ coordinate system which makes a horizontal direction into an XY plane. Fig. 1(a) is a plan view of the holding device 100, and Fig. 1(b) is a cross-sectional view along line C-C'.

[0026] The holding device 100 has a structure 110 surrounding the object 101 , and a base member 103 is provided on the inner wall of the structure 110 . The base member 103 may be formed separately from the structural body 110 or integrally formed with the structural body 110 . Object 101 is held by holding member 106 . In an embodiment, the retaining member 106 may include a plurality of retaining members that retain the e...

no. 2 Embodiment approach ＞

[0045] Next, an embodiment of an optical device using the aforementioned holding device will be described. The optical device in this embodiment has an optical element and the above-mentioned holding device, and the holding device holds the optical element as the above-mentioned object to be held, that is, an object.

[0046] Figure 6 It is a figure showing the structure of the light source device 400 which is an example of the optical device in this embodiment. The light source device 400 includes a light source 407 and a reflector as an optical element that reflects light from the light source 407 in a predetermined direction. In this embodiment, the light source 407 may be, for example, a mercury lamp or a halogen lamp. In addition, the reflector may include an elliptical mirror 401a and a spherical mirror 401b.

[0047] The spherical reflector 401b is arranged such that the bright spot located between the electrodes of the light source 407 becomes the center of the ref...

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PUM

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Abstract

The invention provides a holding device and an optical device, which are advantageous in the positioning precision of a holding object with relative temperature change even if the expansion amount inthe gravity direction is extremely small relative to the expansion amount in the horizontal direction. The holding device includes a structure surrounding an object, a holding member holding the object, a base member provided on an inner wall of the structure, and a support member mounted on the base member and supporting the holding member. A first inclined surface is formed on the surface, supporting the supporting component, of the base component. When the support member is mounted on the first inclined surface, the first inclined surface increases outward in the horizontal direction with respect to the object, a second inclined surface is formed on the surface of the support member supporting the holding member, the second inclined surface increases outward in the horizontal directionwith respect to the object in a state in which the support member is mounted on the first inclined surface, the support member is slidable along the first inclined surface, and the holding member is slidable along the second inclined surface. The holding device maintains the positional deviation of the object within an allowable range by the sliding of the support member and the holding member.

Description

technical field [0001] The invention relates to a holding device for holding an object and an optical device. Background technique [0002] In precision equipment such as semiconductor exposure equipment and liquid crystal exposure equipment, high precision is required for the relative positions of constituent elements. Among them, considerably high positional accuracy is also required for optical elements. Furthermore, in recent years, semiconductor exposure apparatuses, liquid crystal exposure apparatuses, and the like have been remarkably increased in size, and requirements for maintaining positional accuracy accompanying such an increase in size have become severe. [0003] Semiconductor exposure equipment, liquid crystal exposure equipment, etc. are generally used in a clean room at around 23° C., for example. However, in the exposure apparatus, the temperature becomes high in the vicinity of the optical path through which light from the illumination optical system, p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20
CPCG03F7/7015G03F7/70175G03F7/70983
Inventor 新井学
Owner CANON KK