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A kind of liquid circulation system and liquid circulation method

A circulation system and liquid circulation technology, applied in the pipeline system, gas/liquid distribution and storage, mechanical equipment, etc., can solve the problem of inconvenient exhaust of the liquid pump

Active Publication Date: 2020-11-27
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a liquid circulation system and an exhaust method to solve the problem of inconvenient exhaust of liquid pumps in the prior art

Method used

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  • A kind of liquid circulation system and liquid circulation method
  • A kind of liquid circulation system and liquid circulation method
  • A kind of liquid circulation system and liquid circulation method

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Embodiment Construction

[0024] The specific implementation manner of the present invention will be described in more detail below with reference to schematic diagrams. Advantages and features of the present invention will be apparent from the following description and claims. It should be noted that all the drawings are in a very simplified form and use imprecise scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention.

[0025] refer to figure 1 with figure 2 , the present invention provides a liquid circulation system 100, the liquid circulation system 100 includes: a liquid tank 110, a liquid pump 120, a monitoring element 130, a first pipeline 141, a second pipeline 142, a third pipeline 143, Fourth pipeline 144 and control valve 150;

[0026] The liquid in the liquid tank 110 flows into the liquid pump 120 through the first pipeline 141 , and the liquid pump 120 is used to pressurize the liquid flowing out of the liquid t...

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Abstract

The invention provides a liquid circulating system and a liquid circulating method. A liquid pump is started and a control valve is in a closed state, so that liquid in a liquid box can flow into theliquid pump through a first pipeline, flow to an outer unit from the liquid pump through a second pipeline and then flow into the liquid box through a third pipeline; a monitoring element monitors liquid flow of the second pipeline; and whether the control valve is opened or not is determined according to a monitoring result of the monitoring element, and when the control valve is opened, liquid flows to the liquid box from a fourth pipeline through the liquid pump. In the liquid circulating system and the liquid circulating method, the control valve is opened according to the monitoring result of the monitoring element to carry out exhausting on the liquid pump, the exhausting method is convenient to implement and easy to control, and the risk of liquid leakage hardly occurs in exhausting.

Description

technical field [0001] The invention relates to the technical field of temperature control equipment, in particular to a liquid circulation system and a liquid circulation method. Background technique [0002] Liquid circulation system is widely used in various industries, such as: fan coil system in HVAC industry, environmental subsystem of lithography machine in semiconductor industry, external auxiliary liquid temperature control equipment of etching machine, etc., in In the use of the liquid circulation system, the power part of the liquid circulation system is the liquid pump. The reliable operation of the liquid pump is very important to the system, but the liquid pump of the liquid circulation system often contains air, which may cause the following problems: 1. The temperature of the external unit is precisely controlled. 2. The liquid pump contains air, which is harmful to the liquid pump. 3. The gas in the liquid will cause corrosion to the pipeline. The commonly ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F17D1/14F17D3/01F17D5/00
CPCF17D1/14F17D3/01F17D5/00
Inventor 王明
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD