Insulation system and substrate processing apparatus

A technology of isolation system and digital isolator, applied in control/regulation systems, instruments, regulating electrical variables, etc., can solve problems such as damage to reliability or safety, and achieve the effect of enhancing reliability

Pending Publication Date: 2019-11-22
ASM IP HLDG BV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Such an indeterminate state may compromise reliability or safety

Method used

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  • Insulation system and substrate processing apparatus
  • Insulation system and substrate processing apparatus
  • Insulation system and substrate processing apparatus

Examples

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Embodiment Construction

[0020] An isolation system and a substrate processing apparatus according to embodiments will be described with reference to the accompanying drawings. The same or corresponding constituent elements are denoted by the same reference numerals, and repeated descriptions thereof may be omitted.

[0021] figure 1 is a simplified diagram showing an example of an isolation system. The isolation system 10 includes an isolation unit 11 having a digital isolator, an output unit 14 and a controller 12 . The respective configurations of these units will be described below.

[0022] (1) Isolation unit 11

[0023] In the isolation unit 11, for example, a digital isolator is used as an isolation element between an input and an output. The left and right sides of the isolation unit 11 with respect to the dotted line at the center of the isolation unit 11 are electrically isolated from each other, but data communication can be performed between the left and right sides. In a conventional...

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Abstract

Examples of an insulation system include a digital isolator for receiving supply of a first power supply on an input side thereof and receiving supply of a second power supply on an output side thereof, and an output adjusting unit for receiving supply of the second power supply, directly outputting an output of the digital isolator when a voltage of the second power supply is larger than a predetermined voltage, and stopping data output irrespective of the output of the digital isolator when the voltage of the second power supply is smaller or equal to the predetermined voltage.

Description

technical field [0001] Examples are described that relate to isolation systems and substrate processing equipment using the same. Background technique [0002] Currently, optocoupler-based signal isolation has been widely used in systems that require electrical isolation, such as industrial equipment or medical equipment. However, it has become difficult to handle recent high-speed operations using optocouplers in systems due to issues such as low data rates, duty cycle degradation, and the like. Therefore, the aforementioned method has been replaced by an isolation method using a digital isolator capable of solving these problems. [0003] For example, the ADS board is used to control the AIO, DIO related to the reactor with a cycle of 50 milliseconds. In ADS boards, optocouplers are used as isolation elements for DOs. When a photocoupler is used as an isolation element of a fast ADS developed for the purpose of further high-speed driving, a duty ratio of 50% cannot be o...

Claims

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Application Information

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Patent Type & AuthorityApplications(China)
IPC IPC(8): H02M1/00
CPCH02M1/00H02M1/0012G05F1/56H01J37/32174H01J37/3244H02H9/02H02M3/33523H02M3/33576H02M3/33515
Inventor寧幸福牧野勉
OwnerASM IP HLDG BV