A kind of flexible temperature sensor and preparation method thereof

Abstract

The invention provides a flexible temperature sensor and a preparation method thereof, belonging to the field of temperature sensing electronic devices. The sensor of the present invention comprises a first flexible substrate, a first encapsulation layer, a second flexible substrate and a second encapsulation layer, the first flexible substrate is comb-shaped, and n uniformly distributed cavities containing liquid metal are arranged on the second flexible substrate, In terms of structure, through the combination of flexible cavity and liquid metal, it is possible to realize that multiple temperature measurement points do not affect each other, and the temperature measurement sensitivity is high. Ensure that the position of the temperature measurement point does not change.

Description

technical field [0001] The invention belongs to the field of temperature-sensing electronic devices, and in particular relates to a flexible temperature sensor capable of ensuring that temperature measuring points do not deviate and a preparation method thereof. Background technique [0002] Flexible temperature sensors, according to different use environments (such as used in different fields such as medical health monitoring, sports, communications, aerospace, fire protection, etc.), combine temperature sensors with different flexible substrate materials to make sensing devices. However, there are still some problems to be solved in the application of the current flexible temperature sensor: (1) Since most of the sensitive units of the flexible temperature sensor are based on rigid inorganic materials, the modulus of which is much greater than that of the flexible substrate material, the flexible substrate cannot be used during use. It is difficult to achieve good strain c...

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Problems solved by technology

However, there are still some problems to be solved in the application of the current flexible temperature sensor: (1) Since most of the sensitive units of the flexible temperature sensor are based on rigid inorganic materials, the modulus of which is much greater than that of the flexible substrate material, the flexible substrate cannot be used during use. Difficult to achieve good strain coupling with rigid sensitive elements

Even if the flexible base material can enhance the tensile performance within a certain range, if the measurement condition of the measured object is under the condition of large deformation, the limited stretching is still not enough, which will lead to the drift of the temperature measurement point, As a result, the temperature measurement position is inaccurate; (2) the thermal diffusivity of the flexible polymer substrate material widely used at present is on the low side, which makes the thermal diffusion time from the object to be measured to the sensitive unit above the substrate too long, thus making it difficult for the temperature sensitive unit to Timely sense the temperature change of the measured object

[0003] For the current flexible temperature sensor, we have implemented a flexible temperature sensor that combines a flexible material cavity with liquid metal. This structure can not only solve the above-mentioned temperature measurement point drift and long thermal diffusion time under large deformation problem, and can realize the function of multi-point temperature measurement and the temperature measurement points do not affect each other, so as to reflect the temperature difference of different temperature measurement points

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