Adjustable shielding device and electroplating shielding method implemented thereby
A shielding device and adjustable technology, which is applied in the direction of current insulation devices, circuits, electrolytic components, etc., can solve the problems that the uniformity of the coating thickness of the entire wafer cannot be guaranteed, and achieve the effect of wide versatility and uniformity
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[0049] Example 1
[0050] Such as figure 1 As shown, this embodiment discloses an adjustable shielding device. The adjustable shielding device includes a shielding plate 1 and four shielding baffles 2.
[0051] The shielding plate 1 has a hollow structure in the middle. The shielding plate 1 has a hollowed-out center portion 11 and a number of hollowed-out arc portions 12, and the arc portions 12 are arranged on the periphery of the center portion 11.
[0052] The shielding plates 2 respectively correspond to the arc portions 12, and the shielding plates 2 move relative to the arc portions 12 to adjust the covering area of the arc portions 12.
[0053] Such as figure 2 As shown, the arc portion 12 in this embodiment is arranged at a diagonal angle of 45 degrees of the shield plate 1. The angle θ corresponding to the arc portion 12 is 45-90 degrees, the hole width a is 10-20 mm, and the interval b between the arc portion 12 and the center portion 11 is 3-10 mm. Further preferably,...
Example Embodiment
[0061] Example 2
[0062] Such as Figure 4 As shown, this embodiment discloses an adjustable shielding device. The adjustable shielding device includes a shielding plate 1 and four shielding baffles 2.
[0063] The shielding plate 1 has a hollow structure in the middle. The shielding plate 1 has a hollowed-out center portion 11 and a number of hollowed-out arc portions 12, and the arc portions 12 are arranged on the periphery of the center portion 11.
[0064] The shielding plates 2 respectively correspond to the arc portions 12, and the shielding plates 2 move relative to the arc portions 12 to adjust the covering area of the arc portions 12.
[0065] In this embodiment, the adjustable shielding device further includes a plurality of lever arms 3, which act as an adjusting mechanism to drive each shielding plate 2 to move relative to the arc portion 12, so as to adjust the covering area of the arc portion 12. Wherein, in addition to the lever arm 3 of this embodiment, the adjus...
Example Embodiment
[0070] Example 3
[0071] Such as Figure 5 with Image 6 As shown, this embodiment discloses an adjustable shielding device. The adjustable shielding device includes a shielding plate 1 and four shielding baffles 2.
[0072] The shielding plate 1 has a hollow structure in the middle. The shielding plate 1 has a hollowed-out center portion 11 and a number of hollowed-out arc portions 12, and the arc portions 12 are arranged on the periphery of the center portion 11.
[0073] The shielding plates 2 respectively correspond to the arc portions 12, and the shielding plates 2 move relative to the arc portions 12 to adjust the covering area of the arc portions 12.
[0074] Such as Figure 5 with Image 6 As shown, the adjustable shielding device further includes a number of lever arms 3, which act as an adjustment mechanism to drive each shielding plate 2 to move relative to the arc portion 12, thereby adjusting the covering area of the arc portion 12. Wherein, in addition to the lever...
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