MOCVD heater source convenient for installing heating sheet and use method thereof

Abstract

The invention discloses an MOCVD (Metal Organic Chemical Vapor Deposition) heater source convenient for mounting a heating sheet and a use method thereof. The heater source comprises an end cover, a cylinder, a supporting frame, a heating sheet body, a disc, an elliptical rod, an elliptical block, a circular groove, a first reset coil spring, a rotating pin, a first magnetic block, a second magnetic block, a bearing, a first fixing rod, a rotating plate, a first spring, a pressing plate, a second fixing rod, a T-shaped rod, a second spring, a limiting block, a first storage groove, a magneticsquare, a fixed pin, a second reset coil spring, a bolt, a nut, a second storage groove, a second limiting groove, a third spring and a clamping block. According to the invention, the disc is installed inside the cylinder, so that the elliptic rod is installed inside an elliptic hole on the disc, and the elliptic block is reversely rotated, so that the rotating pin rotates to drive the first magnetic block and the second magnetic block to be separated; under the action of an elastic force of the first reset coil spring, the elliptic block rotates to restore the original position to be attachedwith the disc, thereby completing the disc installation; the bolt moves to extrude the clamping block, the clamping block is extruded to move, the clamping block moves into the inside of the second limiting groove, and the end cover is further installed on the cylinder.

Description

technical field [0001] The invention relates to an MOCVD heater source, in particular to an MOCVD heater source which is convenient for installing a heating plate and a method for using the same, belonging to the technical field of MOCVD heaters. Background technique [0002] MOCVD uses organic compounds of group III and group II elements and hydrides of group V and group VI elements as crystal growth source materials, and performs vapor phase epitaxy on the substrate in a thermal decomposition reaction mode to grow various main group III-V, Thin-layer single-crystal materials of II-VI subgroup compound semiconductors and their multiple solid solutions. [0003] The currently used MOCVD heater source has certain defects. It lacks the convenient installation function of the disc, which makes it inconvenient to maintain the disc and the main body of the heating plate, thereby reducing the service life of the main body of the heating plate and lacking the fastening function of ...

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Problems solved by technology

[0003] The currently used MOCVD heater source has certain defects. It lacks the convenient installation function of the disc, which makes it inconvenient to maintain the disc and the main body of the heating plate, thereby reducing the service life of the main body of the heating plate and lacking the fastening function of the main body of the heating plate. Generally, the main body of the heating plate is fixedly installed on the disc, and it is inconvenient to replace the main body of the heating plate, thereby reducing the practicability of the MOCVD heater source. At the same time, the lack of a connecting mechanism makes it inconvenient to install the end cover on the cylinder, reducing the Protective effect on the main body of the heater

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