Novel calibration method for high-precision source-meter integrated measuring equipment
A technology of measuring equipment and calibration method, which is applied to measuring devices, measuring electrical variables, complex mathematical operations, etc., can solve the problems of large calculation amount, unstable system, poor practicability, etc., and achieves easy implementation, small calculation amount, and applicability. strong effect
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[0028] The following takes the voltage of the SMU as the calibration object, and describes the specific implementation method in the range of 100-1000V under the condition of 50Hz.
[0029] The following table is the raw data obtained:
[0030] Table 1
[0031]
[0032] First, the measured value of the SMU is calibrated, and the calibration expression is obtained by using the nonlinear least square method through formula (1):
[0033] X'=-9.4847*10 -11 *X 3 +1.91653913*10 -7 *X 2 +0.999189812*X-0.0992891821 (3)
[0034] Substitute the measured value X of the SMU before calibration to get the measured value X' after calibration.
[0035] Then the setting value of the SMU is calibrated, and the calibration expression is obtained by using the nonlinear least square method through formula (2):
[0036] Z'=-4.394824*10 -9 *Z 3 +6.63190422*10 -6 *Z 2 +0.998267961Z+0.183169069 (4)
[0037] Substitute the setting value Z of the SMU before calibration to get the setting ...
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