A flow measuring component suitable for microgram-level flow with a sealing structure
A technology of sealing structure and flow measurement, applied in the field of sensors, can solve the problems of affecting the downstream working pressure, unable to measure the flow rate, small flow rate of the split flow, etc., and achieve the effect of strong pressure bearing capacity, simple structure and reduced pressure loss.
Active Publication Date: 2021-02-09
BEIJING INST OF CONTROL ENG
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Problems solved by technology
For the flow measurement of microgram level, the use of shunt flow will cause the flow rate to be too small to measure the flow rate and the pressure loss will be too large, which will affect the downstream working pressure.
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[0040] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.
[0041] The invention provides a flow measuring assembly suitable for microgram-level flow with a sealing structure, which includes a measuring element, a ceramic electrical connector, and a flow channel assembly. The measuring element is used to sense the measured fluid flow, convert the flow signal into a changing resistance signal, and then convert it into a change in voltage analog quantity; the ceramic electrical connector is used to carry the measuring element, and connect the measuring element through the conductive film on the ceramic material. The measured signal is output and cooperates with the flow channel assembly to play the role of pressure bearing and sealing; the flow channel assembly carries the measured fluid to form a laminar flow heat exchange channel, and at the same time cooperates with the ceramic electrical conn...
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Abstract
The invention provides a flow measuring assembly suitable for microgram-level flow with a sealing structure, which includes a measuring element, a ceramic electrical connector, and a flow channel assembly. The measuring element is used to sense the measured fluid flow, convert the flow signal into a changing resistance signal, and then convert it into a change in voltage analog quantity; the ceramic electrical connector is used to carry the measuring element, and connect the measuring element through the conductive film on the ceramic material. The measured signal is output and cooperates with the flow channel assembly to play the role of pressure bearing and sealing; the flow channel assembly carries the measured fluid to form a laminar flow heat exchange channel, and at the same time cooperates with the ceramic electrical connector. The invention has the advantages of simple structure, high reliability, small size and light weight, and is suitable for high-precision measurement of microgram-level gas.
Description
technical field [0001] The invention discloses a flow measurement assembly suitable for microgram-level flow with a sealing structure, which belongs to the technical field of sensors. Background technique [0002] The traditional flow sensor has a large flow range, basically above milligrams, so its flow channel structure is designed as a split flow mode. By measuring the split gas flow, the overall gas flow is calculated. This measurement method is suitable for flow measurement above milligram level. For the flow measurement of microgram level, the use of shunt flow will cause the flow rate to be too small to measure the flow rate and the pressure loss will be too large, which will affect the downstream working pressure. Contents of the invention [0003] The technical problem to be solved by the present invention is to provide a flow measurement assembly suitable for microgram-level flow with a sealing structure in order to meet the requirements of high precision and mi...
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IPC IPC(8): G01F1/692G01F15/00G01F15/14
CPCG01F1/6847G01F1/692G01F15/00G01F15/14
Inventor 付新菊张恒吕泰增关威刘旭辉汪旭东龙军李秀堂石召新杨灵芝王平蒋庆华李恒建王宇
Owner BEIJING INST OF CONTROL ENG