MOCVD heater source and operation method thereof

Abstract

The invention discloses an MOCVD heater source and an operation method thereof. The MOCVD heater source comprises a mounting plate, a fixed strip, a fixed pipe, an electromagnet, guiding rings, movable iron rods, first springs, second springs, fixed covers, embedding pillars, a bearing plate, an MOCVD heater, a heat preservation cover, metal shells, an asbestos filling layer, a high-heat-conduction ceramic sheet, first heat conduction protrusions, a metal heat conduction cover, second heat conduction protrusions, a top cover, an exhaust fan, a hinge, a threaded ring, an activated carbon filternet, straight rods, fixed ball blocks and hasp latches. According to the MOCVD heater source and the operation method thereof, through two parallel mounting structures, the MOCVD heater source can beconvenient to mount and dismount, thus maintenance and replacement are facilitated, and the situation that after the heater source is damaged, the replacement time is too long, which results in prolonging of the heating time is avoided; through the arrangement of the heat conduction structure, heat conduction can be conducted, the conduction temperature is uniform, the interior of the metal heatconduction cover can be uniformly heated, the heating effect is good, and the phenomenon that heating is not uniform is avoided.

Description

technical field [0001] The invention relates to an MOCVD heater source and an operation method thereof, belonging to the technical field of MOCVD heater applications. Background technique [0002] An electric heater refers to an electrical appliance that uses electric energy to achieve a heating effect; it is small in size, high in heating power, and widely used. It adopts an intelligent control mode, has high temperature control accuracy, and can be networked with a computer; it has a wide range of applications, long life, and high reliability. ; The core of the heater principle is energy conversion, the most extensive is the conversion of electrical energy into thermal energy. [0003] The existing MOCVD heater source may lack a heat conduction structure, and the utilization of heat is poor, and the heating of the object may be uneven, so that the object is unevenly heated. At the same time, the general heater is installed by bolts, dismantled It is inconvenient to instal...

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Problems solved by technology

[0003] The existing MOCVD heater source may lack a heat conduction structure, and the utilization of heat is poor, and the heating of the object may be uneven, so that the object appears to be unevenly heated. At the same time, the general heater is installed by bolts. It is inconvenient to install

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