Debugging method of secondary temperature compensation zero point of silicon piezoresistive pressure sensor
A pressure sensor and temperature compensation technology, applied in the direction of measuring fluid pressure, instruments, measuring devices, etc., can solve the problems of zero-point output debugging difficulties, low debugging pass rate, etc., and achieve low debugging costs, simple pre-adjustment operations, and high debugging efficiency Effect
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[0018] refer to figure 1 , figure 2. According to the present invention, utilizing the principle of piezoresistive variation of semiconductor diffused silicon, four equivalent semiconductor resistors are diffused in a specific direction of the silicon diaphragm, and connected into a Wheatstone bridge, as a force-electric conversion sensitive element; The sensitive resistors R1 and R2 of the Wheatstone bridge are connected to the power supply VCC, the sensitive resistors R3 and R4 are connected to the ground GND, and the sensitive resistors R1 and R3 are connected to the double-armed bridge circuit and the sensitive resistors R2 and R4. Connect Vout+ zero-point debugging resistor 1 and negative preset resistor 3 in parallel between the positive terminal Vout+ of the output signal of the arm bridge line and the GND terminal of the power supply, and at the same time connect the negative terminal Vout- of the output signal of the double-arm bridge line between the sensitive resi...
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