Fixing components for fragile pipe fittings and semiconductor processing equipment

Abstract

The present invention provides a fixing assembly for a fragile pipe, comprising: a support and a limiter; the limiter is fixed on the support, and both of them form a pipe boss for accommodating the fragile pipe And the limited space is provided in the axial and radial directions of the fragile pipe, which is used to prevent the fragile pipe from falling. The present invention also provides a semiconductor processing equipment including the above-mentioned fixing assembly of the fragile pipe, which can simultaneously improve the process quality and ensure the safety of the fragile pipe.

Description

technical field [0001] The invention belongs to the technical field of microelectronics processing, and in particular relates to a fixing component of a fragile pipe fitting and semiconductor processing equipment. Background technique [0002] In semiconductor processing equipment, it is unavoidable to cooperate with a fragile tube such as a quartz tube and a non-fragile tube such as a metal tube. During the mating, since the fragile tube is relatively easy to break, reliable fixing is required during use. To prevent it from bumping and tilting, it is also necessary to maintain a certain gap when mating to prevent the non-fragile pipe fittings from being heated and squeezing the fragile pipe fittings. In addition, the matching installation also needs to pay attention to the installation accuracy to prevent the influence on the airflow distribution of the chamber, so as to prevent the influence on the process quality. [0003] figure 1 It is a schematic diagram of a partial...

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Problems solved by technology

The above-mentioned installation method of the quartz tube in the prior art has the following problems: the quartz tube 1 is directly placed on the metal flange 2, and the quartz tube 1 is not constrained in the height direction, so there is a risk of tipping over, and there is also a risk of the quartz tube 1 and the The risk that the manifold chamber 4 is not concentric also has the risk of affecting the quality of the process. In order to reduce this risk, the gap between the quartz tube 1 and the metal flange 2 needs to be small. Thermal expansion easily occurs in the high chamber, which will squeeze the quartz tube 1 and damage the quartz tube 1. Therefore, there is a problem in the prior art that the process quality and the safety of the quartz tube 2 cannot be guaranteed at the same time.

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