Sensor for simultaneously measuring bending strain and pressure

Abstract

The invention discloses a sensor for simultaneously measuring bending strain and pressure. The sensor comprises a first support layer, a metal film layer, a dielectric layer, a second support layer and an electrode layer, all of which are sequentially arranged from bottom to top. The metal film layer is embedded between the first supporting layer and the dielectric layer and used for sensing bending strain, and the electrode layer and the metal film layer are arranged in parallel and used for forming a capacitive pressure sensor together with the metal film layer. The sensor can detect pressure and bending strain at the same time, the manufacturing process is non-toxic, a mask is not needed, and the cost is saved.

Description

technical field [0001] The invention relates to the field of pressure and bending strain measurement, in particular to a sensor for measuring bending strain and pressure. Background technique [0002] With the rapid development of the field of human-computer interaction, electronic skin has received great attention. Electronic skin detects temperature, strain, humidity and pressure by simulating human skin and converting external stimuli into electrical signals, and because electronic skin needs to realize the function of single-point parallel multi-function detection, that is, it can detect multiple stimuli at the same time. Sensors that detect stimuli. [0003] In the prior art, there are following disadvantages regarding the manufacturing method of this type of sensor: [0004] (1) The layered structure leads to a complex structure of the sensor, which is difficult to align during the production process; [0005] (2) Using complex manufacturing processes such as photol...

AI Technical Summary

Problems solved by technology

[0004] (1) The layered structure leads to a complex structure of the sensor, which is difficult to align during the production process;

[0005] (2) Using complex manufacturing processes such as photolithography and vacuum deposition, resulting in waste of materials;

[0006] (3) Difficult to commercialize

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