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Optical sensor for phase determination

A phase, light beam technology in the field of optical sensors for phase determination

Pending Publication Date: 2020-04-10
TOKYO ELECTRON LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] One of the challenges is to accurately determine the phase / state of CO2 in the clean room to facilitate the cleaning process

Method used

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  • Optical sensor for phase determination
  • Optical sensor for phase determination
  • Optical sensor for phase determination

Examples

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Embodiment Construction

[0031] The following disclosure provides many different implementations or examples for implementing different features of the presented subject matter. Specific examples of components and arrangements are described below to simplify the present disclosure. These are of course only examples and are not intended to be limiting. Additionally, the present disclosure may repeat reference numerals and / or letters in various examples. This repetition is for simplicity and clarity and by itself does not indicate a relationship between the various implementations and / or configurations discussed.

[0032] In addition, for the convenience of description, spatially relative terms such as "under", "below", "lower", "above", "upper", etc. may be used herein to describe the The relationship of one element or feature to another element or feature. Spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depic...

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Abstract

An apparatus and a method for in-situ phase determination are provided. The apparatus includes a measurement chamber configured to retain a substance, and an entrance window mounted on a side of the measurement chamber. An exit window is mounted on an opposite side of the measurement chamber, and the exit window is parallel with the entrance window. The apparatus further includes a light source configured to generate an incident light beam. The incident light beam is directed to the entrance window at a non-zero angle of incidence with respect to a normal of the entrance window. The incident light beam passes through the entrance window, the measurement chamber and the exit window to form an output light beam. A detector is positioned under the exit window and configured to collect the output light beam passing through the exit window and generate measurement data.

Description

[0001] Priority Claims and Cross References [0002] This disclosure claims the benefit of US Provisional Application No. 62 / 548,382, filed August 21, 2017, which is incorporated herein by reference in its entirety. Background technique [0003] Most substances turn into gases when heated above a certain temperature. Likewise, gases become liquids and / or solids when compressed above a certain pressure or cooled below a certain temperature. Materials such as carbon dioxide, when subjected to pressures and temperatures above the so-called critical point, become so-called supercritical fluids, which have properties distinctly different from those of liquids or gases. Although generally liquid-like, supercritical CO 2 Has a near-zero viscosity and exhibits a near-zero surface tension. [0004] The development of wafer cleaning solutions in the semiconductor industry has led to the use of supercritical fluids to remove wet cleaners and / or other residues from wafer surfaces. In ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/41G01N21/03G01N21/55G01N33/00
CPCH01L21/6719G01N2021/1761G01N2021/4153G01N21/4133H01L21/67253H01L21/02101G01N2021/4193G01N21/0303G01N21/55G01N33/004G01N2021/4173G01N2201/06113H01L21/67028
Inventor 伊万·马莱耶夫米哈伊尔·米哈洛夫褚汉友孟庆玲高琼林陈艳田新康
Owner TOKYO ELECTRON LTD
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