Bulk acoustic wave resonator with variable doping concentration, filter and electronic equipment
A bulk acoustic wave resonator and doping concentration technology, applied in electrical components, impedance networks, etc., can solve problems such as affecting the performance of the resonator, increasing the resonator resonator, and the sub-layer not being tightly combined.
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[0042] The technical solutions of the present invention will be further specifically described below through the embodiments and in conjunction with the accompanying drawings. The following description of the embodiments of the present invention with reference to the accompanying drawings is intended to explain the general inventive concept of the present invention, but should not be construed as a limitation of the present invention.
[0043] Refer below Figure 2-5 A bulk acoustic wave resonator according to an embodiment of the present invention is described.
[0044] figure 2 is a schematic cross-sectional view of a bulk acoustic wave resonator according to an exemplary embodiment of the present invention.
[0045] Such as figure 2 As shown, the bulk acoustic wave resonator includes a substrate 201, an acoustic mirror 203, a bottom electrode 205, a piezoelectric layer 207, and a top electrode 209. In addition, the top electrode 209 is also provided with a cantilever s...
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