Locating Method of Memory Failure Point
A positioning method and failure point technology, applied in static memory, instruments, etc., can solve problems such as low accuracy and reduce the success rate of failure analysis work, and achieve the effect of improving positioning accuracy and simple positioning method
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[0023] The specific implementation of the method for locating memory failure points provided by the present invention will be described in detail below in conjunction with the accompanying drawings.
[0024] figure 1 is a cutaway schematic of an existing memory, see figure 1 The 3D NAND bonding (bonding) memory includes a support layer 10 and a device layer 11 disposed on the support layer 10 . Performing failure analysis on memory is generally performing failure analysis on device layer 11. When performing failure analysis on the device layer 11, it is necessary to locate the failure point. Generally, the failure point of the device layer 11 is located by the method of grabbing points on the back side and grabbing points on the front side. The backside grasping point is to locate the failure point of the device layer 11 from the side of the supporting layer 10. The disadvantage is that the supporting layer 10 will block the positioning signal (such as a laser signal or an ...
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