Piezoelectric transducer, method for manufacturing piezoelectric transducer, and electronic device

Abstract

The invention relates to a piezoelectric transducer, a method for preparing the piezoelectric transducer and electronic equipment. A piezoelectric transducer, comprising a support structure and a piezoelectric diaphragm arranged on the support structure; the piezoelectric diaphragm includes a beam, and one end of the beam in a first direction is supported by the support structure , the other end is a free end; the piezoelectric diaphragm includes a first electrode layer and a piezoelectric material layer sequentially stacked on the support structure; wherein, the area of ​​the piezoelectric material layer at the free end is smaller than that of the first electrode layer The area of ​​an electrode layer. Compared with the traditional piezoelectric transducer, the piezoelectric transducer, the method for preparing the piezoelectric transducer and the electronic equipment mentioned above have greater bending stress when the piezoelectric diaphragm is deformed, especially when the piezoelectric transducer is a piezoelectric transducer. When using electro-acoustic transducers, the signal-to-noise ratio is relatively high.

Description

technical field [0001] The invention relates to the field of electronic technology, in particular to a piezoelectric transducer, a method for preparing the piezoelectric transducer and electronic equipment. Background technique [0002] In the preparation of piezoelectric transducers, it is difficult to control the residual stress of the thin-film stack in the piezoelectric diaphragm manufacturing process, so that the stress of the full-film piezoelectric transducer cannot be released. Therefore, the rigidity of the piezoelectric diaphragm will be increased, resulting in piezoelectric transduction Sensitivity drops. [0003] The traditional solution is to make the piezoelectric diaphragm into a cantilever beam structure to release the residual stress and improve the sensitivity of the piezoelectric transducer. However, when the piezoelectric diaphragm is deformed, the bending stress is still insufficient. Especially when the piezoelectric transducer is a piezoelectric elec...

AI Technical Summary

Problems solved by technology

However, when the piezoelectric diaphragm is deformed, the bending stress is still not enough

Especially when the piezoelectric transducer is a piezoelectric electroacoustic transducer, the bending stress is not enough when the piezoelectric diaphragm is deformed, and the signal-to-noise ratio of the piezoelectric electroacoustic transducer cannot meet the requirements.

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