Cleaning equipment for image sensor chip production

A technology for image sensors and cleaning equipment, which can be applied to cleaning methods using liquids, cleaning methods and utensils, chemical instruments and methods, etc., and can solve the problems of low degree of automation and low cleaning efficiency.

Active Publication Date: 2020-05-01
合肥芯测半导体有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide a cleaning device for the production of image sensor chips, which has the advantages of automatic cleaning, salvage and drying, and a high degree of automation, and solves the problem of low cleaning efficiency and low degree of automation of existing image sensor chips

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  • Cleaning equipment for image sensor chip production
  • Cleaning equipment for image sensor chip production
  • Cleaning equipment for image sensor chip production

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Embodiment Construction

[0034] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0035] see Figure 1-5, the present invention provides a technical solution: a cleaning device for image sensor chip production, including a cleaning box 1, two sets of ultrasonic generators 9 are fixedly connected to the inside of the cleaning box 1, and two sets of ultrasonic generators 9 are fixedly connected to the inside of the cleaning box 1. Two symmetrical transfer grooves 2, the middle part of the bottom surface of the cleaning box 1 is provided with ...

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Abstract

The invention discloses cleaning equipment for image sensor chip production and relates to the technical field of sensor chip production. The equipment comprises a cleaning box body, wherein two setsof ultrasonic generators are fixedly connected with the interior of the cleaning box body, two symmetrical conveying grooves are fixedly connected with the interior of the cleaning box body, a grooveis formed in the middle of a bottom face of the cleaning box body, a containing hopper is arranged in the groove, and a conveying device is arranged at the bottom of the cleaning box body. The cleaning equipment for image sensor chip production is advantaged in that by arranging a positive and negative rotation motor, under the combined action of a screw rod and a screw ring, the containing hoppercan ascend, so the chip contained in the containing hopper achieves purposes of automatic cleaning, automatic air blowing and automatic drying, a problem that a traditional image sensor chip needs tobe cleaned and air-dried in the later period is solved, and a purpose of automatic operation of the device is achieved.

Description

technical field [0001] The invention relates to the technical field of sensor chip production, in particular to a cleaning device for image sensor chip production. Background technique [0002] The image sensor is the core and the most critical technology of a digital camera. In a traditional camera, the film is a photosensitive material. After being treated with a certain chemical, it will record the captured image. In a digital camera , The image sensor replaces the position of the film to form an electronic image. [0003] Existing image sensor chips must be cleaned before use. The traditional cleaning method is to place the chip inside a box with an ultrasonic generator for cleaning. The cleaned chip needs to be salvaged manually and needs to be cleaned and air-dried again later. The degree of automation is relatively high. Low waste of human resources, for this reason we propose a cleaning equipment for image sensor chip production to solve this problem. Contents of ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67B08B3/02B08B3/12B08B13/00
CPCB08B3/02B08B3/12B08B13/00H01L21/67034H01L21/67051H01L21/67242
Inventor 刘家铭张孝仁苏华庭
Owner 合肥芯测半导体有限公司
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