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Substrate fixing structure, clamp and clamping system

A technology for fixing structures and substrates, applied in the field of solar cells, can solve problems such as substrate fragmentation, and achieve the effect of ensuring normal coating processing

Pending Publication Date: 2020-05-05
紫石能源有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The main purpose of the present invention is to provide a substrate fixing structure, jig and clamping system to solve the problem in the prior art that the substrate fixing structure easily lifts up the substrate during the removal process, causing the substrate to break

Method used

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  • Substrate fixing structure, clamp and clamping system
  • Substrate fixing structure, clamp and clamping system
  • Substrate fixing structure, clamp and clamping system

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Embodiment Construction

[0030] It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and examples.

[0031] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meaning as commonly understood by those of ordinary skill in the art to which this application belongs.

[0032] In the present invention, in the absence of a contrary statement, the used orientation words such as "up and down" usually refer to the direction shown in the drawings, or refer to the vertical, vertical or gravity direction Similarly, for the convenience of understanding and description, "left and right" usually refer to the left and right shown in the drawings; The words are not used to limit the invention.

[0033] In order to solve the problem in...

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PUM

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Abstract

The invention provides a substrate fixing structure, a clamp and a clamping system. A substrate is clamped between the substrate fixing structure and a carrier plate, the substrate fixing structure comprises a body, the body is provided with an air inlet hole, a communicating part and exhaust holes, the air inlet hole communicates with the exhaust holes through the communicating part, and the exhaust holes are arranged on the first surface, facing the substrate, of the body, and gas exhausted from the exhaust holes enters between the substrate and the substrate fixing structure. According to the substrate fixing structure, the clamp and the clamping system, the problem that in the prior art, a substrate is broken due to the fact that in the taking process of a substrate fixing structure, the substrate is easily brought away together with the structure is effectively solved.

Description

technical field [0001] The invention relates to the technical field of solar cells, in particular to a substrate fixing structure, a clamp and a clamping system. Background technique [0002] At present, solar cell production line equipment can be divided into horizontal production line equipment and vertical production line equipment. Among them, the horizontal production line equipment is that the substrate and the carrier pass through the chamber in the horizontal direction, and the coating is performed from top to bottom (or from bottom to top). The vertical production line equipment is that the substrate and the carrier pass through the chamber in the vertical direction, and the coating is performed from one side. Compared with horizontal production line equipment, vertical production line equipment has the characteristics of small footprint and easy operation. [0003] In the prior art, in order to prevent the substrate from falling off during the coating process, th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/50H01L31/18
CPCC23C14/50H01L31/18Y02P70/50
Inventor 苏艳波
Owner 紫石能源有限公司