Device and method for measuring gas pressure and components of cavity of extremely-small sealing device

A technology of gas pressure and measuring devices, which is applied in the direction of measuring devices, measuring fluid pressure, simultaneous measurement of multiple hydraulic valves, etc., can solve the problems that cannot meet the needs of packaging technology evaluation of extremely small sealing devices, and achieve the purpose of overcoming the quality discrimination effect, The effect of low measurement lower limit and small measurement uncertainty

Active Publication Date: 2020-05-12
LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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Problems solved by technology

Therefore, the existing methods for measuring the gas component content in the cavity of sealed devices ca

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  • Device and method for measuring gas pressure and components of cavity of extremely-small sealing device
  • Device and method for measuring gas pressure and components of cavity of extremely-small sealing device
  • Device and method for measuring gas pressure and components of cavity of extremely-small sealing device

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[0036] The present invention will be described in detail below with reference to the drawings and embodiments.

[0037] The invention provides a device and method for measuring the gas pressure and composition of the cavity of an extremely tiny sealed device, such as figure 1 As shown, including vacuum gauge A 1, vacuum gauge B 14, pressure measuring chamber 2, puncture structure, tested sealing device compression ring 7, tested sealing device 8, tested sealing device mounting flange 9, shut-off valve A 10 , Shut-off valve B 11, shut-off valve C 13, sampling orifice 12, component measuring chamber 15, shut-off valve A 16, shut-off valve B 20, shut-off valve C 21, shut-off valve D 24, evacuation orifice 17, partial pressure mass spectrum Gauge 18, evacuated cavity 19, low vacuum pump 22, high vacuum pump 23 and corresponding pipelines.

[0038] Among them, the vacuum gauge A 1 is installed on the pressure measurement chamber 2 to realize the pressure measurement of the pressure mea...

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Abstract

The invention discloses a device and method for measuring the gas pressure and components of the cavity of an extremely-small sealing device. With the device and method of the invention adopted, the measurement of the gas pressure and component content of the cavity of an extremely-small sealing device of which the gas sealing device inner cavity volume ranges from 0.005-0.1 cm <3> can be realized. The method of the invention is a measurement method combining static expansion and dynamic flow mass spectrometry. With a double-small-hole structure adopted, not only can a gas sampling quality discrimination effect be overcome, but also the pressure stability of a pressure measurement cavity and a component measurement cavity can be ensured. According to an existing method, problems exist, in a measurement process, that the pressure attenuation of the cavity of a measured sealing device is fast, mass spectrometry time sequence response is slow, and the accurate measurement of the gas components of a product of which the sealing device inner cavity volume is very small cannot be achieved. With the device and method of the invention adopted, the problems in the prior art can be solved.

Description

technical field [0001] The invention relates to the technical field of vacuum measurement, in particular to a device and method for measuring gas pressure and components in a cavity of an extremely small sealed device. Background technique [0002] Aerospace, aviation and other fields use gas-sealed devices. If the concentration of impurity gases inside the package, such as water vapor, oxygen, hydrogen, and carbon dioxide, is too high, it will cause corrosion, electrical performance parameter drift, and electron migration inside the device. Therefore, the gas pressure and component content in the cavity of the sealed device are one of the important indicators for evaluating the reliability of the package of the hermetic device. The traditional test method adopts the method of cavity puncture sampling and dynamic mass spectrometry analysis at the same time. During the sampling and analysis process, the cavity pressure of the sealed device under test decays rapidly. For extre...

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Application Information

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IPC IPC(8): G01M13/00G01L15/00G01N27/62
CPCG01M13/00G01L15/00G01N27/62
Inventor 陈联成永军董猛郭美如张瑞年冯天佑黄宏
Owner LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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