Overlay marking method, overlay measuring method and overlay mark
An overlay marking and marking technology, applied in semiconductor/solid-state device testing/measurement, semiconductor/solid-state device components, semiconductor devices, etc., can solve problems such as affecting yield level, reducing reflection, and difficulty in measurement, and achieves a high level of improvement. Accuracy, the effect of increasing contrast
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[0050] In order to make the technical solutions and advantages of the embodiments of the present application clearer, the specific technical solutions of the present application will be further described in detail below in conjunction with the drawings in the embodiments of the present application. The following examples are used to illustrate the present application, but not to limit the scope of the present application.
[0051] In the following description, references to "some embodiments" describe a subset of all possible embodiments, but it is understood that "some embodiments" may be the same subset or a different subset of all possible embodiments, and Can be combined with each other without conflict.
[0052] If there is a similar description of "first / second" in the application documents, add the following explanation. In the following description, the terms "first\second\third" are only used to distinguish similar objects, not Represents a specific ordering of objec...
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