Surface acoustic wave device and manufacturing method thereof
A surface acoustic wave device and surface acoustic wave technology, applied in the direction of electrical components, impedance networks, etc., can solve problems such as high technological difficulty
Pending Publication Date: 2020-05-29
CETC DEQING HUAYING ELECTRONICS
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Problems solved by technology
For 5G communication frequency devices up to several GHz, the width and spacing of the interdigital electrodes are only about half a micron, which is very difficult in process technology
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[0034] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0035] The present invention provides a technical solution: a surface acoustic wave device, including a piezoelectric substrate, a metal electrode structure fabricated on the surface of the piezoelectric substrate, and at least one effective surface acoustic wave transmission device on the surface of the piezoelectric substrate. A dielectric body is inlaid on the edge of the channel area, and the dielectric body serves as a side wall of the surface acoustic wav...
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The invention relates to the technical field of surface acoustic wave transducers, and especially relates to a surface acoustic wave device and a manufacturing method thereof. The surface acoustic wave device comprises a piezoelectric substrate and a metal electrode structure manufactured on the surface of the piezoelectric substrate. A dielectric body is embedded in the edge of at least one effective surface acoustic wave transmission channel region on the surface of the piezoelectric substrate; the dielectric body is used as the side wall of the surface acoustic wave acoustic waveguide. According to the invention, the dielectric body is embedded on the surface of the piezoelectric substrate to be used as the hard side wall of the acoustic surface wave acoustic waveguide, and the transmitted acoustic surface wave is reflected and diffracted by using the dielectric body embedded on the surface, so an acoustic surface wave transmission channel required by the device is directly manufactured on the surface of the piezoelectric substrate, and the acoustic surface wave is guided to be transmitted according to a design specification.
Description
technical field [0001] The invention relates to the technical field of surface acoustic wave transducers, in particular to a surface acoustic wave device and a manufacturing method thereof. Background technique [0002] A radio frequency filter device that uses surface acoustic wave (SAW=surface acoustic wave, surface acoustic wave) to convert radio frequency signals into sound waves and in turn convert sound waves into radio frequency signals to realize the function of radio frequency signal filtering is the key element of today's communication equipment device. [0003] Sound waves are mechanical vibrations transmitted by means of physical media. Due to the different properties of physical media, the transmission characteristics of sound waves are different. The surface acoustic wave was discovered due to the study of underground earthquakes that caused major damage to human beings. Its characteristics are: the acoustic wave energy is only transmitted within a few acousti...
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IPC IPC(8): H03H9/145H03H9/25
CPCH03H9/145H03H9/25
Inventor 李勇温旭杰何朝峰王祥邦肖功亚黄亮
Owner CETC DEQING HUAYING ELECTRONICS