Sheet carrying table clamping mechanism

Abstract

The invention discloses a sheet carrying table clamping mechanism, and belongs to the technical field of scanning electron microscopes, transmission electron microscopes and semiconductor vacuum accessories. The sheet carrying table clamping mechanism comprises springs, a left clamping block, a copper mesh, a right clamping block, a positioning plate and a knurled screw, the left clamping block and the right clamping block are matched in an embedded mode, the outer side wall of the left clamping block and the outer side wall of the right clamping block are each provided with an arc groove usedfor positioning the spring, and the springs are fixed to the two arc grooves correspondingly. The sheet carrying table clamping mechanism can meet the requirement of copper mesh storage applied to the electron microscope industry, firstly, sample pollution can be effectively avoided, and the experiment reliability is improved; secondly, due to the plane clamping mechanism, the smoothness of a carrying mesh can be well guaranteed, and the service life of the carrying mesh can be prolonged; thirdly, a liquid nitrogen groove is also provided, so that a low-temperature environment can be quicklyprovided, and the experiment efficiency is greatly improved; and fourthly, the whole mechanism is very simple to operate.

Description

technical field [0001] The invention relates to a clamping mechanism for a sheet carrier, belonging to the technical fields of scanning electron microscopes, transmission electron microscopes and semiconductor vacuum accessories. Background technique [0002] Many samples in the semiconductor and electron microscope industries need to use a grid with a diameter of 3 mm and a thickness of 10-30 μm as a carrier. The grid with the sample needs to be stored well to avoid damage to the sample, and because the grid needs to be kept flat, Otherwise, it will affect the experimental results, so the storage of the carrier net has become a problem that needs to be considered. At present, there is no such clamping scheme on the market, and only sealed bags or storage can be used, which will easily cause sample contamination and affect the quality of the experiment. Reliability, and the carrier network is easy to bend and no longer flat, shortening the service life of the carrier network...

AI Technical Summary

Problems solved by technology

[0002] Many samples in the semiconductor and electron microscope industries need to use a grid with a diameter of 3 mm and a thickness of 10-30 μm as a carrier. The grid with the sample needs to be stored well to avoid damage to the sample, and because the grid needs to be kept flat, Otherwise, it will affect the experimental results, so the storage of the carrier net has become a problem that needs to be considered. At present, there is no such clamping solution on the market, and only sealed bags or storage can be used, which will easily cause sample contamination and affect the experimental results. Reliability, and the carrier network is easy to bend and no longer flat, shortening the service life of the carrier network

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