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An evaporation heating device and control method

A heating device and evaporation technology, applied in vacuum evaporation coating, sputtering coating, ion implantation coating and other directions, can solve the problems of poor uniformity, slow heating and heat conduction of evaporation, achieve uniform heating and ensure evaporation rate The effect of uniformity

Active Publication Date: 2022-01-25
WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The embodiment of the present application provides an evaporation heating device and a control method to solve the problems of slow thermal conduction and poor uniformity of the existing evaporation heating

Method used

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  • An evaporation heating device and control method
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  • An evaporation heating device and control method

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Embodiment Construction

[0041] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Apparently, the described embodiments are only some of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without making creative efforts belong to the scope of protection of this application.

[0042] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Orientation indicated by rear, left, right, vertical, horizontal, top, bottom, inside, outside, clockwise, counterclockwise, etc. The positional relationship is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the a...

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Abstract

The present application discloses an evaporation heating device and a control method, which uniformly heats the evaporation material in the crucible by means of microwave heating, which overcomes the fact that the vacuum environment in the crucible is heated by resistance wires, which is not conducive to heat conduction, and, The evaporation temperature is controlled by closed-loop control, so that the entire evaporation material is heated evenly during the evaporation process, and the uniformity of the evaporation rate is ensured.

Description

technical field [0001] The present application relates to the technical field related to evaporation production, in particular to an evaporation heating device and a control method. Background technique [0002] With the development of display technology, the evaporation process has been widely used. The existing evaporation heating device mainly relies on heat conduction to heat the organic evaporation material. Since the crucible is in a vacuum state during the evaporation process, the heating speed is relatively slow. Generally, it takes about five hours to reach a stable heating rate. Moreover, the existing heating method mainly uses resistance wire heating. Since the characteristic of resistance wire heating is from the outside to the inside of the crucible, if the temperature rises too fast, it is easy to cause local overheating of the material. Fast, deterioration occurs; it is easy to cause uneven heating of the organic matter evaporation material during the evaporat...

Claims

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Application Information

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IPC IPC(8): C23C14/24C23C14/26C23C14/54C23C14/12
CPCC23C14/24C23C14/26C23C14/54C23C14/12
Inventor 赵海李启明
Owner WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD