Three-plane reference mirror flatness absolute measurement method based on small deflection

An absolute measurement and reference mirror technology, applied in the field of optical inspection, can solve the problems of time-consuming and low surface data sampling rate, and achieve the effect of improving the measurement range

Active Publication Date: 2020-06-05
SHANGHAI UNIV
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

However, this method is very time-consuming, and there is a problem that the closer to the boundary of the reference mirror, the lower the sampling rate of the surface data

Method used

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  • Three-plane reference mirror flatness absolute measurement method based on small deflection
  • Three-plane reference mirror flatness absolute measurement method based on small deflection
  • Three-plane reference mirror flatness absolute measurement method based on small deflection

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Embodiment Construction

[0050] Preferred embodiments of the present invention are described in detail as follows in conjunction with accompanying drawings:

[0051] This embodiment is based on the small deflection three-plane reference mirror flatness absolute measurement method, and the measurement system adopted includes three plane reference mirror A 1, plane reference mirror B 2, plane reference mirror C 3, high Precision Fizeau-type laser interferometer 4, reference mirror fixing frame 5, x-direction and y-direction mobile platform 6, electric control turntable 7, pitch and tilt adjustment platform 8 and lifting platform 9; the lifting platform 9 is at the bottom for Ensure that reference mirrors A1, B2, and C3 are at the same height during measurement. The tilting and pitching adjustment platform 8 prevents from being below the electric control turntable 7, and is used to adjust the axis of the electric control turntable 7 to be perpendicular to the outgoing light wavefront of the laser. The m...

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Abstract

The invention relates to a three-plane reference mirror flatness absolute measurement method based on small deflection. Firstly, two reference mirrors are respectively fixed on an interferometer and areference mirror bracket, and a multi-dimensional adjusting mechanism is adjusted to ensure that each point of the two reference mirrors corresponds to each other. By respectively replacing the positions of the three reference mirrors, the mixed surface error between every two reference mirrors can be collected, and then the phase error of the three reference mirrors on the y axis is calculated by utilizing a simple geometrical relationship. Actually, the mixed surface shape error contains a large amount of redundant information, in order to obtain the information, the reference mirror to bemeasured rotates clockwise and anticlockwise around the direction perpendicular to the optical axis by a small amplitude in one measurement process, a fringe pattern with an inclined phase differenceis obtained, and the fringe pattern is analyzed to obtain a distortion phase. And finally the high-resolution complete surface shape information of the two reference mirrors is obtained according to the flow chart. And the surface shape of the third reference mirror can be simply solved.

Description

technical field [0001] The invention belongs to the technical field of optical detection, and in particular relates to an absolute measurement method for flatness of a three-plane reference mirror based on small deflection. Background technique [0002] Large-aperture optical planar components are widely used in various national defense and civilian fields such as inertial confinement nuclear fusion, high-precision lithography machines, and astronomical monitoring. The surface processing quality of a single planar element will directly affect the performance of the entire optical system, so higher requirements are placed on the surface accuracy of the optical plane. This makes the inspection of optical planar components particularly important. At present, most of the commonly used optical element surface detection methods are relative detection methods, that is, interferometry, but this method assumes that the reference plane is an ideal plane for measurement, which is equi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/30
CPCG01B11/30
Inventor 林星羽陈鼎夫于瀛洁
Owner SHANGHAI UNIV
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