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Contamination detection method and equipment for mask plate

A detection method and mask technology, applied in image analysis, image enhancement, instruments, etc., can solve the problems affecting the yield rate of display panel products and low detection efficiency, and achieve the effect of improving the efficiency of stain detection

Active Publication Date: 2022-07-26
KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

If the stains on the mask cannot be detected in a timely and effective manner, using a stained mask for production will affect the product yield of the display panel
However, the existing stain detection methods have the problem of low detection efficiency

Method used

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  • Contamination detection method and equipment for mask plate
  • Contamination detection method and equipment for mask plate
  • Contamination detection method and equipment for mask plate

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Embodiment Construction

[0062] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for the convenience of description, the drawings only show some but not all structures related to the present invention.

[0063] Embodiments of the present invention provide a method for detecting stains on a mask. The method for detecting stains on a mask can be performed by a stain detecting device on a mask, and can be implemented by software and / or hardware. Perform a stain detection and determine the location of the stain in the image of the reticle to be tested. figure 1 A schematic flowchart of a method for detecting stains on a mask plate provided by an embodiment of the present invention. see figure 1 , the method for detecting stains on t...

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Abstract

Embodiments of the present invention disclose a method and device for detecting stains on a mask plate. The method for detecting stains on a mask includes: presetting a set of multi-level standard images with sizes arranged from large to small, and retrieving a first-level standard image with a non-minimum size in the multi-level standard images as a comparison image and the The images of the area to be tested are compared, and according to the comparison result, it is judged whether the partial image of the image of the area to be tested contains a stained image; wherein, the size of the partial image of the image of the mask to be tested containing stains is reduced step by step, avoiding the problem of targeting the mask. The way each opening in the plate image is compared one by one, therefore, embodiments of the present invention can locate the location of the stain more quickly. Compared with the prior art, the embodiment of the present invention improves the efficiency of stain detection.

Description

technical field [0001] Embodiments of the present invention relate to the field of display technology, and in particular, to a method and device for detecting stains on a mask. Background technique [0002] With the continuous development of display technology, the application range of display panels is becoming wider and wider, people have higher and higher requirements on display panels, and display panel manufacturers have higher and higher process requirements for display panels. [0003] Among them, the evaporation process is an important step in the panel manufacturing process, and the mask is a key component used in the evaporation process. As the evaporation production proceeds, the evaporation material will remain on the surface of the mask, forming stains and blocking the openings of the mask. If the stains on the mask cannot be detected in a timely and effective manner, using a mask containing stains for production will affect the product yield of the display pan...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G06T7/00G06T7/70
CPCG06T7/001G06T7/70G06T2207/30121
Inventor 朱朝月杨硕杨斌张迪孙林举
Owner KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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