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A kind of nanocomposite coating and preparation method thereof

A nano-composite coating, composite target technology, applied in coatings, metal material coating technology, vacuum evaporation plating and other directions, can solve the problem of nano-composite coating hardness, elastic modulus, poor resistance to high temperature oxidation, inability to Meet the high-speed cutting performance requirements and other issues

Active Publication Date: 2021-12-21
上海工具厂有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the above-mentioned nanocomposite coatings still have the problems of poor hardness, elastic modulus and high temperature oxidation resistance, which cannot meet the performance requirements of high-speed cutting and dry cutting

Method used

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  • A kind of nanocomposite coating and preparation method thereof
  • A kind of nanocomposite coating and preparation method thereof

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preparation example Construction

[0032] The present invention also provides (AlCrTiZrMo)-Si described in the above technical scheme x -The preparation method of N nanocomposite coating, comprises the following steps:

[0033] The target is magnetron sputtered on the substrate to obtain (AlCrTiZrMo)-Si x -N nanocomposite coating;

[0034] The target is AlCrTiZrMoSi x Composite target material, the AlCrTiZrMoSi x The atomic percentage of Si in the composite target is >0 and ≤16%;

[0035] The parameter of described magnetron sputtering is:

[0036] Ar gas flow: 5~20sccm;

[0037] N 2 Air flow: 5~20sccm;

[0038] DC sputtering power: 100~300W;

[0039] DC sputtering time: 1~3h;

[0040] Target base distance: 5 ~ 7cm;

[0041] Total air pressure: 0.3~0.7Pa;

[0042] Substrate temperature: 100-300°C.

[0043] In the present invention, the AlCrTiZrMoSi x The atomic percentage of Si in the composite target is preferably 4%, 8%, 12% or 16%.

[0044] In the present invention, the AlCrTiZrMoSi x The diamet...

Embodiment 1

[0056] A kind of (AlCrTiZrMo)-Si with high hardness and high elastic modulus x -N nanocomposite coating is made of AlCrTiZrMoSi by multi-target magnetron sputtering x The composite target is formed by performing magnetron sputtering reaction deposition on the substrate; the substrate is single crystal Si.

[0057] The above-mentioned (AlCrTiZrMo)-Si with high hardness and high elastic modulus x -The preparation method of N nanocomposite coating, specifically comprises the following steps:

[0058] (1), cleaning the substrate

[0059] First, the polished substrate is sent to an ultrasonic cleaning machine, followed by 30 kHz ultrasonic cleaning in analytical pure anhydrous alcohol and acetone for 10 minutes; then ion beam cleaning is performed, that is, the substrate is put into a vacuum chamber and vacuumed to 3× 10 -3 Inject Ar gas after Pa, maintain the vacuum at 2Pa, and conduct ion bombardment on the substrate with a medium frequency (400Hz) for 30min, with a power of ...

Embodiment 2

[0072] A kind of (AlCrTiZrMo)-Si with high hardness and high elastic modulus x -N nanocomposite coating is made of AlCrTiZrMoSi by multi-target magnetron sputtering x The composite target is formed by performing magnetron sputtering reaction deposition on the substrate; the substrate is single crystal Si.

[0073] The above-mentioned (AlCrTiZrMo)-Si with high hardness and high elastic modulus x -The preparation method of N nanocomposite coating, specifically comprises the following steps:

[0074] (1), cleaning the substrate

[0075] First, the polished substrate is sent to an ultrasonic cleaning machine, followed by 30 kHz ultrasonic cleaning in analytical pure anhydrous alcohol and acetone for 10 minutes; then ion beam cleaning is performed, that is, the substrate is put into a vacuum chamber and vacuumed to 3× 10 -3 Inject Ar gas after Pa, maintain the vacuum degree at 3Pa, conduct ion bombardment on the substrate with intermediate frequency for 30min, and the power is ...

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Abstract

The invention relates to the technical field of nanocomposite coatings and provides a (AlCrTiZrMo)-Si x ‑N nanocomposite coatings and methods for their preparation. (AlCrTiZrMo)-Si provided by the present invention x ‑N nanocomposite coating consisting of (AlCrTiZrMo)N matrix phase and Si 3 N 4 interfacial phase; the Si 3 N 4 The interface phase divides the (AlCrTiZrMo)N matrix phase into several matrix phase units, and the outside of each matrix phase unit is surrounded by Si 3 N 4 Surrounded by the interface. The present invention enables the coating to form an interface phase Si through Si doping 3 N 4 The nanocomposite structure wrapped with nanocrystalline (AlCrTiZrMo)N, the interfacial phase hinders the slippage of (AlCrTiZrMo)N nanocrystalline grains along the grain boundary, and inhibits the microscopic deformation of the nanocomposite film, so as to achieve the effect of comprehensively improving the hardness and elastic modulus .

Description

technical field [0001] The invention relates to the technical field of nanocomposite coatings, in particular to a (AlCrTiZrMo)-Si x -N nanocomposite coating and preparation method thereof. Background technique [0002] With the progress of society and the development of science and technology, the requirements for surface properties of materials are getting higher and higher. Various indicators such as high hardness, wear resistance, corrosion resistance, and high temperature resistance are important indicators to measure the performance of today's cutting tools. According to the engineering needs, coating a layer of hard coating on the surface of the material is an economical and practical way to improve the surface performance of the material. As an important branch of the mechanical functional film, the hard coating is widely used in machining tools , especially in metal cutting. Hard coating can improve the surface properties of materials, reduce friction and wear with...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/06
CPCC23C14/35C23C14/0641C23C14/0652C23C14/0036
Inventor 符国建祝新发陆红妹孟漪李伟牛景锐
Owner 上海工具厂有限公司