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Substrate transmission method, control module and substrate transmission system

A technology of transmission module and transmission method, which is applied in the direction of transportation and packaging, conveyor objects, semiconductor/solid-state device manufacturing, etc., to achieve the effect of improving substrate transmission efficiency

Active Publication Date: 2020-06-26
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, practice has shown that by increasing the transport speed of all substrate cassette robots, the overall time was reduced by only 19s

Method used

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  • Substrate transmission method, control module and substrate transmission system
  • Substrate transmission method, control module and substrate transmission system
  • Substrate transmission method, control module and substrate transmission system

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach

[0065] As an embodiment of the present invention, a substrate robot is used to transport the substrate. This can be achieved with the following command Image 6 Velocity curve in :

[0066] GET_Speed_Setup(Step1,Step2,Step3,Step4,Step5)

[0067] PUT_Speed_Setup(Step1,Step2,Step3,Step4,Step5)

[0068] GET_Acceleration_Step1(a1,a2,a3)

[0069] GET_Acceleration_Step2(a1,a2,a3)

[0070] GET_Acceleration_Step3(a1,a2,a3)

[0071] GET_Acceleration_Step4(a1,a2,a3)

[0072] GET_Acceleration_Step5(a1,a2,a3)

[0073] PUT_Acceleration_Step1(a1,a2,a3)

[0074] PUT_Acceleration_Step2(a1,a2,a3)

[0075] PUT_Acceleration_Step3(a1,a2,a3)

[0076] PUT_Acceleration_Step4(a1,a2,a3)

[0077] PUT_Acceleration_Step5(a1,a2,a3)

[0078] The parameters a1, a2, and a3 set in the function Acceleration respectively represent the three acceleration sub-stages in the speed curve and the three deceleration sub-stages in the speed curve. The parameters Step1, Step2, Step3, Step4, and Step5 set in ...

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Abstract

The invention provides a substrate transmission method, and the method is used for sequentially transmitting a plurality of substrate boxes containing substrates, and comprises the following steps: sequentially transmitting the first M substrate boxes containing substrates to be processed from a bearing frame to a preparation area at a first transmission speed; sequentially transferring the rest substrate boxes containing the substrates to be processed from a bearing frame to the preparation area at a second transmission speed, wherein the first substrate box containing the processed substrateto the (L-N)-th substrate box containing the processed substrate in the preparation area are sequentially conveyed to the bearing frame at a third conveying speed; and sequentially conveying the lastN substrate boxes containing the processed substrates in the preparation area to the bearing frame at a fourth conveying speed. The invention further provides a control module of the substrate conveying device and a substrate conveying system. By means of the substrate conveying method, the substrate conveying speed can be effectively increased.

Description

technical field [0001] The invention relates to the field of microelectronics processing, in particular to a substrate transmission method, [0002] A control module for a substrate transfer device and a substrate transfer system including the control module. Background technique [0003] During the processing of microelectronic products, it is often necessary to transfer substrates from one location to another. For example, the transfer process of the substrate in the machine is as follows: the substrate storage box enters the transfer area of ​​the machine for temporary storage, and the storage box robot is used to transfer the substrate from the substrate storage box to the vacuum preparation area (load lock), Then, the substrate is taken out from the substrate storage box by the substrate manipulator and placed on the quartz boat. The quartz boat rises into the pipeline to carry out the process. Transfer from the quartz boat to the substrate storage box. Finally, the ...

Claims

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Application Information

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IPC IPC(8): H01L21/677H01L21/67
CPCH01L21/67745H01L21/67253
Inventor 王凯张云鹏慕晓航
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD