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Manufacturing method of film body electrode and film

A manufacturing method and thin-film body technology, applied in the field of electrodes, can solve problems such as inaccurate detection of thin-film electrical characteristics

Active Publication Date: 2020-07-07
WUYI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For this reason, the present invention proposes a method for manufacturing a thin-film body electrode. The method for manufacturing a thin-film body electrode has simple steps and can solve the problem of inaccurate detection of the electrical characteristics of the film.

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  • Manufacturing method of film body electrode and film
  • Manufacturing method of film body electrode and film
  • Manufacturing method of film body electrode and film

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Embodiment Construction

[0025] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0026] In the description of the present invention, if there are descriptions of first, second, third, fourth, etc., it is only for the purpose of distinguishing technical features, and it cannot be understood as indicating or implying relative importance or implicitly indicating the indicated The number of technical features or implicitly indicates the sequence of the indicated technical features.

[0027] In the description of the present invention, unless otherwise clearly defined, terms such as setting and connecting should be unders...

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Abstract

The invention discloses a manufacturing method of a film body electrode. The manufacturing method comprises the following steps: placing a film on a substrate; injecting a conductive material into thetwo ends of the thin film through magnetron sputtering to form thin film body electrodes; and optimizing the contact between the thin film body electrode and the thin film through a rapid annealing process. According to the method, the conductive material can enter the two ends of the thin film through magnetron sputtering, the body electrodes are formed at the two ends of the thin film, and thenthe formed body electrodes and the thin film can be well combined through a rapid annealing process. Compared with a traditional method of adding a conductive electrode outside the thin film, the method has the advantages that the measured electrical property of the thin film is more accurate; meanwhile, the manufacturing method is simpler, and very complex process requirements are not needed. Inaddition, when the body electrode manufactured by the method is used for detecting the high-resistance thin film, the detection effect is more outstanding.

Description

technical field [0001] The invention belongs to the field of electrodes, and in particular relates to a method for manufacturing a thin-film body electrode and a thin film. Background technique [0002] With the development of science and technology, various thin films are used more and more widely in various fields. Correspondingly, the requirements for the electrical characteristics of thin films are getting higher and higher and more precise. Therefore, in many use environments, it is necessary to The electrical characteristics of the film are detected in advance. [0003] When measuring the electrical properties of the film, the traditional method is to paste conductive glue on both ends of the film as conductive electrodes, and then apply pressure to the conductive electrodes at both ends, and then measure the relationship between the voltage and current at both ends of the film. However, when conductive glue is used as the conductive electrode, because it is an extern...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R1/04G01R27/08
CPCG01R1/0416G01R27/08
Inventor 齐成剑唐秀凤黄腾程廖慧珍张庆浩
Owner WUYI UNIV
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