An AC high-power MW level constant temperature and voltage regulation automatic control plasma power supply

Abstract

The invention relates to an AC high-power MW-level constant temperature and voltage regulation automatic control plasma power supply, which includes: a three-phase power input device, a transformer box, a reaction box and a gas control box; the reaction box includes a high-temperature heating device, several plasma reaction cabinets and the first A channel opening, the plasma reaction cabinet is vertically and evenly divided into the first area and the second area, the plasma reaction cabinet includes a ventilation port, a relay, several heating groups, a semiconductor working block and a polarized power supply; the gas control box includes a working gas box and The protective gas box and the working gas box are connected to the gas exchange port through the main first gas channel; by mixing the working gas in a certain proportion, the mixed gas added to the plasma reaction cabinet can provide both fast and continuous power supply, so that The plasma power supply is more even, and there will be no fluctuations in power supply.

Description

technical field [0001] The invention relates to the field of plasma power supplies, in particular to an AC high-power MW level constant temperature and voltage regulation automatic control plasma power supply. Background technique [0002] The high-frequency high-voltage power supply ionizes the gas in the channel, excites high-energy electrons, and the high-energy electrons collide with the exhaust gas molecules inelastically. When the energy is greater than the chemical bond energy of the exhaust gas molecules, the pollutants are decomposed, and the inelastic collisions also produce a large number of positive Negative ions, excited ions and free radicals, which react with exhaust gas molecules can also decompose pollutants. The low-temperature plasma treatment method has the advantages of high efficiency, low energy consumption, wide application range, and easy operation. Therefore, the use of plasma technology to treat toxic substances or difficult-to-degrade substances i...

AI Technical Summary

Problems solved by technology

[0005] Aiming at the process of regulating the voltage of the plasma power supply, when the gas is converted into plasma, it needs to absorb a large amount of heat to raise the temperature to the dissociation temperature, and in this way, the power that the plasma power supply can provide will fluctuate to a certain extent. The invention provides an AC high-power MW level constant temperature and voltage regulation automatic control plasma power supply

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