Volume substitution method vacuum cavity volume test system and test method thereof
A technology of vacuum cavity and testing system, which is applied in the direction of volume measurement instrument/method, container/cavity measurement, liquid/fluid solid measurement, etc. It can solve the problems of difficult accurate volume measurement and achieve small outgassing and accurate measurement , The effect of small material outgassing rate
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[0023] Below in conjunction with accompanying drawing, technical scheme of the present invention is described in further detail:
[0024] A volume substitution method vacuum cavity volume testing system, such as figure 1 As shown, it includes the first vacuum chamber Vch, the second vacuum chamber Vtest, the first vacuum gauge G1, the second vacuum gauge G2, the mechanical pump RP, the molecular pump TMP, the first vacuum valve V1, the second vacuum valve V2, the third Vacuum valve V3, fourth vacuum valve V4, fifth vacuum valve V5, a gas flow controller MFM, a pressure reducing valve V6, a nitrogen bottle and a thermostat CTB;
[0025] Wherein, the mechanical pump RP is respectively connected with one end of the first vacuum valve V1 and the pumping outlet of the molecular pump TMP, and the other end of the first vacuum valve V1 is respectively connected with the first vacuum gauge G1 and the first vacuum chamber Vch, and the molecular The suction inlet of the pump TMP is con...
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