Manipulator Capable of Grabbing Multiple Graphite Boats and Grabbing Method of Manipulator

Abstract

The invention discloses a manipulator capable of grabbing a plurality of graphite boats and a grabbing method of the manipulator. The manipulator includes a plurality of installation bodies, and the installation body includes a mounting seat, an upper fixing seat, and a lower telescopic seat. On the purification platform, the upper fixed seat is fixedly connected with the installation seat, and the lower telescopic seat is movably arranged on the lower end surface of the upper fixed seat. In each installation body, a tray assembly is provided on the installation body at the head and tail ends, and each of the middle Two tray assemblies are arranged on the installation main body, and the tray assemblies are movably arranged on the lower expansion seat, and the tray assemblies on two adjacent installation main bodies form a pair. The methods include: the graphite boat is in place, the manipulator grabs the boat, the manipulator puts the boat on the loading and unloading paddles or puts the boat on the buffer rack and then puts it on the loading and unloading paddles, sends the boat into the chamber, takes the boat out of the chamber, and takes the boat out of the manipulator Put it on the buffer rack, take the boat back to the original position with the robot arm. The manipulator of the present invention can grasp multiple graphite boats at one time, which improves the production capacity.

Description

technical field [0001] The invention relates to PECVD equipment, in particular to a manipulator capable of grasping a plurality of graphite boats and a manipulator grasping method. Background technique [0002] Solar energy is an inexhaustible clean energy on the earth. Silicon wafers are processed into solar cells after several processes. Surface coating is one of the core processes of solar cell processing. The graphite boat is the carrier of the solar cells in the surface coating process, and the manipulator is located on the clean table of the PECVD equipment, which is used for automatic loading and unloading of the graphite boat. After the large furnace body is manufactured, the reaction chamber has enough space, and the loading capacity of the graphite boat and the grabbing speed of the manipulator are important factors that restrict the production capacity of the surface coating equipment. With the demand for large production capacity of photovoltaic cells, graphite ...

AI Technical Summary

Problems solved by technology

The manipulator grabs a graphite boat at a time and puts it on the upper and lower paddles, and the upper and lower paddles send the graphite boat into or out of the reaction chamber, because a single graphite boat has limited the release of equipment capacity, and the working intensity of a single manipulator is relatively saturated, while The reaction chamber can accommodate multiple graphite boats, which means that only one graphite boat can be loaded at a time, resulting in low production efficiency and reduced production capacity

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