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Medium-order and low-order surface shape detection device and system for large-aperture plane mirror and storage medium

A detection device and flat mirror technology, applied in measurement devices, optical devices, instruments, etc., can solve the problem of vibration sensitivity and other problems, and achieve the effects of reducing external vibration sensitivity, reducing costs, and improving accuracy

Active Publication Date: 2020-08-18
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

To sum up, the combination of discrete sub-aperture and Ricky-Common method can greatly reduce the cost of medium-order surface shape detection of large-aperture flat mirrors, improve efficiency and broaden the application scenarios of detection, but it cannot solve the problem of Ricky-Common. Sensitivity to external vibrations during measurement

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  • Medium-order and low-order surface shape detection device and system for large-aperture plane mirror and storage medium
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  • Medium-order and low-order surface shape detection device and system for large-aperture plane mirror and storage medium

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[0054] In order to enable those skilled in the art to better understand the solution of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. Apparently, the described embodiments are only some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0055] like figure 1 as shown, figure 1 It is a schematic diagram of the basic optical path structure of the Ricky-Common method in the prior art. figure 1 The interferometer 02 emits light beams to the surface of the plane mirror 01. After being reflected by the plane mirror 01, it is incident on the mirror 03. The mirror 03 is a spherical mirror. It can be seen from the mirror image 04 formed by the mirror...

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Abstract

The invention discloses a low-order surface shape detection device of a large-aperture plane mirror, a medium-order surface shape detection device of the large-aperture plane mirror, a medium-low-order surface shape detection system and device of the large-aperture plane mirror, and a computer readable storage medium. The low-order surface shape detection device and the medium-order surface shapedetection device both use the same Rayleigh-Coanda optical path architecture; a detection part similar to an HASO wavefront sensor is formed by a micro lens array and a camera to detect low-order surface shape data; therefore, the low-order surface shape of the large-aperture plane mirror is obtained, the difficulty and the cost of low-order surface shape detection are simplified, the camera and the aperture baffle plate are matched with the medium surface shape data, the medium surface shape data of the large-aperture plane mirror are further obtained, the influence of environmental vibrationon medium surface shape detection is avoided, and the detection cost is reduced. The medium-order surface shape detection device and the low-order surface shape detection device are combined to realize medium-low surface shape detection of the large-aperture plane mirror.

Description

technical field [0001] The invention relates to the technical field of plane mirror surface shape detection, in particular to a low-level surface shape detection device for a large-diameter plane mirror, a medium-level surface shape detection device for a large-diameter plane mirror, and a middle-low level surface shape detection system and device for a large-diameter plane mirror , and computer-readable storage media. Background technique [0002] Black holes, dark matter and dark energy, the origin of the universe, the origin of celestial bodies, the origin of life in the universe and other hot scientific targets in the astronomy community need to use large-aperture telescopes to obtain higher light-gathering area (proportional to the square of the aperture) and resolution (proportional to the aperture Proportional) and other technical means. As a key component of large-aperture telescopes, large-aperture flat mirrors are also increasing in size and performing more and mo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
CPCG01B11/24
Inventor 安其昌刘欣悦李洪文唐境
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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