A kind of directional passive driving thin film and its preparation method

A directional passive and self-driven technology, applied in the manufacture of microstructure devices, instruments, fluid velocity measurement, etc., can solve problems such as complex process methods, and achieve the effect of simple preparation process

Active Publication Date: 2021-02-26
SHENZHEN TECH UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In view of the deficiencies of the above-mentioned prior art, the object of the present invention is to provide an oriented passive self-driven thin film and its preparation method, aiming to solve the problem of complex process methods in the preparation of directional passive self-driven artificial structures. question

Method used

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  • A kind of directional passive driving thin film and its preparation method
  • A kind of directional passive driving thin film and its preparation method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0054] Step 1: Deposit a layer of 50nm Ti thin film on the glass substrate by magnetron sputtering deposition process.

[0055] Step 2: Write the directional passive driving pattern on the 50nm metal Ti film by laser direct writing technology to obtain a patterned film. Among them, the writing parameters of the laser direct writing technology are: laser power 4mW; laser pulse width 1ms.

[0056] Step 3: immerse the obtained patterned thin film in 4.5% HF diluent for 20 minutes to obtain an oriented passive-driven thin film.

[0057] Step 4: When the water mist is sprayed onto the surface of the prepared directional passive source-driven film, the droplets can move along such as figure 1 Move in the direction indicated by the dotted arrow to realize long-distance transportation.

[0058] Experiments have found that a 50nm Ti film can be completely etched in about 15 minutes, and the TiO obtained by laser oxidation 2 Patterns are preserved. Since the HF diluent has an isotro...

Embodiment 2

[0060] Step 1: Deposit a layer of 200nm Ti thin film on the glass substrate by magnetron sputtering deposition process.

[0061] Step 2: Write the directional passive driving pattern on the 200nm metal Ti film by laser direct writing technology to obtain a patterned film. Among them, the writing parameters of the laser direct writing technology are: laser power 4mW; laser pulse width 1ms.

[0062] Step 3: immerse the obtained patterned thin film in 4.5% HF diluent for 100 min to obtain an oriented passive-driven thin film.

[0063] Step 4: When the water mist is sprayed onto the surface of the prepared directional passive source-driven film, the droplets can move along such as figure 1 Move in the direction indicated by the dotted arrow to realize long-distance transportation.

Embodiment 3

[0065] Step 1: Deposit a layer of 20nm Ti thin film on the glass substrate by magnetron sputtering deposition process.

[0066] Step 2: Write the directional passive driving pattern on the 20nm metal Ti film by laser direct writing technology to obtain a patterned film. Among them, the writing parameters of the laser direct writing technology are: laser power 4mW; laser pulse width 1ms.

[0067] Step 3: immerse the obtained patterned thin film in 4.5% HF diluent for 10 minutes to obtain an orientation passively driven thin film.

[0068] Step 4: When the water mist is sprayed onto the surface of the prepared directional passive source-driven film, the droplets can move along such as figure 1 Move in the direction indicated by the dotted arrow to realize long-distance transportation.

[0069] Compared with the anisotropic surface produced by chemical gradients in the prior art, which leads to slow movement speed and limited long-distance transport distance of droplets, the pr...

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Abstract

The invention provides an orientation passive driven thin film and a preparation method thereof. The preparation method of the directional passive drive film comprises the steps of: depositing a metal film on a substrate; writing a directional passive drive pattern on the metal film by using laser writing technology; writing the directional passive drive pattern on the metal film Wet etching is carried out to obtain an directional passive self-driven film; the directional passive self-driven pattern includes a plurality of end-to-end connected directional passive self-driven pattern units; each of the directional passive self-driven pattern units includes: a width A gradually increasing drive zone, a constriction zone connected to the drive zone and gradually decreasing in width, wherein the length of the drive zone is longer than the length of the constriction zone. The invention combines the laser writing technology with the wet etching method to prepare the directional passive self-driven thin film with the hanging cut edge, the whole preparation process does not need a mask, and the preparation process is very simple and convenient.

Description

technical field [0001] The invention relates to the field of micro-nano manufacturing, in particular to an oriented passive self-driven thin film and a preparation method thereof. Background technique [0002] There are many organisms with anisotropic surface structures in nature, and their surfaces show typical directional differences in liquid manipulation, such as desert beetles, spider silks, cacti and pitcher plants, due to the special micro-nano structures on their surfaces Furthermore, it exhibits excellent directional transport ability. [0003] The construction of surface microstructures has attracted extensive research interest in recent years. Mainly inspired by the above-mentioned biological micro-nano structure, the existing bionic water collection technology at home and abroad, for example, the design of micro-nano structure based on the water collection principle of desert beetle, cactus and pitcher plant has achieved unprecedented droplet Growth and transpo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81B7/00B81C1/00
CPCB81B7/00B81C1/00158B81C1/00349
Inventor 王萌王宁仇明侠何铁锋张良静项炳锡王蒙
Owner SHENZHEN TECH UNIV
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