Slurry for silk-screen printing electrochemical etching as well as preparation method and application of slurry
A technology of screen printing and screen printing device is applied in the field of slurry for screen printing electrochemical etching and its preparation, which can solve the problems of etching, inability to achieve selectivity, etc.
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[0077] figure 1 It is a schematic diagram of the steps of the preparation method of the slurry according to the present invention. The preparation method includes the following steps: (1) mixing and stirring a thickener and a solvent to obtain a first prefabricated slurry; (2) mixing the prepared slurry obtained in step (1). The first prefabricated slurry is ultrasonically pulverized and ground to obtain a second prefabricated slurry; (3) the second prefabricated slurry obtained in step (2), ammonium fluoride and hydrogen fluoride are mixed, stirred and dispersed to obtain a third prefabricated slurry (4) The third prefabricated slurry obtained in step (3) is allowed to stand and filter to obtain the slurry for screen printing electrochemical etching.
[0078] figure 2 A schematic diagram of the method steps for etching a silicon substrate with the slurry according to the present invention and screen printing electrochemical etching technology, such as figure 2 As shown, t...
Example Embodiment
[0085] Example 1
[0086] This embodiment provides a paste for screen printing electrochemical etching, and the preparation method of the paste for screen printing electrochemical etching includes the following steps:
[0087] (1) after the deionized water of 93g is preheated to 65 ℃, add the xanthan gum of 1.5g and the polyurethane thickener of 1g, and then stir 20min with the rotating speed of 500rpm at 65 ℃, obtain the first prefabricated slurry;
[0088] (2) after the first prefabricated slurry obtained in step (1) is ultrasonically pulverized for 10 minutes at a power of 1000W, a three-roll mill is used to grind to obtain a second prefabricated slurry with a particle size of 1-20 μm;
[0089] (3) mixing the second prefabricated slurry obtained in step (2), 3 g of ammonium fluoride and 1.5 g of hydrofluoric acid, and stirring at 25° C. for 30 min at a rotational speed of 200 rpm to obtain a third prefabricated slurry;
[0090] (4) The third prefabricated slurry obtained i...
Example Embodiment
[0091] Example 2
[0092] This embodiment provides a paste for screen printing electrochemical etching, and the preparation method of the paste for screen printing electrochemical etching includes the following steps:
[0093] (1) after the deionized water of 94g is preheated to 65 ℃, add the xanthan gum of 1g and the polyurethane thickener of 1g, and then stir 20min with the rotating speed of 500rpm at 65 ℃, obtain the first prefabricated slurry;
[0094] (2) after the first prefabricated slurry obtained in step (1) is ultrasonically pulverized for 10 minutes at a power of 1000W, a three-roll mill is used to grind to obtain a second prefabricated slurry with a particle size of 1-20 μm;
[0095] (3) mixing the second prefabricated slurry obtained in step (2), 2 g of ammonium fluoride and 2 g of hydrofluoric acid, and stirring at 25° C. for 30 min at a rotational speed of 200 rpm to obtain a third prefabricated slurry;
[0096] (4) The third prefabricated slurry obtained in st...
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