High-pressure efficient vacuum energy-saving pump

Abstract

The invention discloses a high-pressure efficient vacuum energy-saving pump. The high-pressure efficient vacuum energy-saving pump comprises a base, a motor and a pump body, wherein a top screw of thebase is fixedly provided with the motor and the pump body; a sealing shaft in the pump body is connected to a screw shaft; the top of the pump body is fixedly provided with a gas inlet tube and a gasoutlet tube separately; one end of the screw shaft penetrates through the pump body and is positioned in a butt-joint slot; a cold gas inlet tube and a cold gas outlet tube are separately mounted outside a first sealing door and a second sealing door; a cold gas through tube penetrates through the first sealing door and the second sealing door, and is positioned in the butt-joint slot; a mountingrod is fixedly arranged on the inner wall of the butt-joint slot; one end of the cold gas outlet tube is positioned in a placing slot; and heat dissipation holes are formed in the tail end of the motor. The high-pressure efficient vacuum energy-saving pump disclosed by the invention can filter entering gas, so that impurities in the gas are prevented from affecting rotation of the screw shaft; and meanwhile, the inner part of the screw shaft is cooled, so that cooling efficiency is improved, and the motor is synchronously cooled.

Description

technical field [0001] The invention relates to the technical field of vacuum pumps, in particular to a high-pressure high-efficiency vacuum energy-saving pump. Background technique [0002] A vacuum pump is a device that uses mechanical, physical or chemical methods to pump out the gas in the pumped container to form a vacuum. In the use of vacuum pumps, there are various types of vacuum pumps used in different industries, including water ring vacuum pumps, Screw vacuum pump and slide valve vacuum pump; [0003] The use of the screw vacuum pump, due to its high internal pressure, has a high vacuum efficiency, and at the same time can achieve oil-free vacuum pumping, which is more energy-saving. It is suitable for gas occasions containing a large amount of water vapor and a small amount of dust. Semiconductors and other industries that have high requirements for clean vacuum are widely used. However, the existing screw vacuum pumps have the following problems in use: [00...

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Problems solved by technology

[0006] The purpose of the present invention is to provide a high-pressure high-efficiency vacuum energy-saving pump to solve the problem that the existing screw vacuum pump proposed by the above-mentioned background technology needs to ensure a good internal cooling effect and at the same time need to filter impurities in the gas

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