Grating ruler dynamic error detection system and detection method

Abstract

The invention discloses a grating ruler dynamic error detection system. The system comprises a first device, a second device, a signal acquisition controller and a computer, wherein the first device is used for obtaining a real-time position of a to-be-detected grating ruler; the second device is used for determining a reference position of the to-be-detected grating ruler; the signal acquisitioncontroller is used for sending position signals acquired by the first device and the second device to the computer; and the computer compares the received position signals to determine a dynamic errorof the grating ruler. According to the detection system, laser interference is adopted as a length reference, simulation of different operation conditions of the grating ruler is achieved through a servo linear motor, a double-channel signal collecting and processing system based on an FPGA is designed, synchronous collection of the reference signal and real-time signals is achieved, and measurement results are analyzed and displayed through data storage and subsequent transmission processing.

Description

Technical field [0001] The present invention relates to the technical field of grating ruler performance detection, and more specifically, to a detection system and method for detecting dynamic errors of grating rulers. Background technique [0002] The grating ruler is an important position feedback component, which is widely used in modern machining industries such as CNC machine tools. High-performance grating rulers, especially large-travel and high-precision absolute grating rulers, are one of the technical bottlenecks of my country's high-end fully closed-loop CNC machine tools, and currently almost all rely on imports. [0003] At present, there have been some domestic researches in the static and dynamic characteristics research and dynamic detection of grating scales. Zheng Liming of Changchun Institute of Optics and Mechanics has studied static accuracy detection and correction methods. The plan mainly considers the impact of static geometric errors on accuracy, and does...

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Problems solved by technology

[0004] Based on research at home and abroad, it is found that the current detection of grating ruler errors is mainly static error detection, and some researches involving dynamic errors of gratings are only dynamic error measurements under specific working conditions, or the factors affecting dynamic errors are not considered comprehensively and lack systematicness research, such as the lack of dynamic accuracy detection of large-range, high-precision grating rulers

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