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Article storage device and automatic conveyer vehicle and apparatus for producing liquid crystal display device

A technology for liquid crystal display and manufacturing equipment, which can be applied to conveyor objects, transportation and packaging, instruments, etc., and can solve problems such as lower yield

Inactive Publication Date: 2003-08-20
MITSUBISHI ELECTRIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Adhesion of impurities is a cause of yield reduction

Method used

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  • Article storage device and automatic conveyer vehicle and apparatus for producing liquid crystal display device
  • Article storage device and automatic conveyer vehicle and apparatus for producing liquid crystal display device
  • Article storage device and automatic conveyer vehicle and apparatus for producing liquid crystal display device

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Embodiment Construction

[0034] Hereinafter, a stocker and an automatic transfer vehicle for a hermetic glass substrate cassette according to the present invention, and a liquid crystal display device manufacturing apparatus using these devices will be described in detail with reference to the accompanying drawings. figure 1 It is an explanatory diagram showing an example of the liquid crystal display device manufacturing apparatus according to the third aspect, figure 2 It is an explanatory diagram showing an example of the liquid crystal display device manufacturing apparatus according to the sixth aspect.

[0035] figure 1 The liquid crystal display device manufacturing apparatus shown is by accommodating the sealed type glass substrate box (such as image 3 Shown in the prior art sliding type cassette) cleaning stocker 7, is used to carry out the multiple processing device 2 of the processing for making liquid crystal display device to glass substrate and is used for cleaning stocker 7 and proc...

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Abstract

This invention is constituted of a clean stocker 7 for hermetically sealed glass substrate cassette having openable and closable lids, at least one set of a processing part 2 for applying a processing for producing a liquid crystal display device with respect to the glass substrate and automatic carriers 3 for carrying cassettes in between the clean stocker 7 and processing parts 2 and is constituted so that the clean stocker 7 is provided with lid opening and closing mechanism 6 for opening and closing the lids of the cassettes. This invention is capable of realizing the saving of the space of a processing device group, the reducing of costs of processing devices and the suppressing of foreign matter with respect to the glass substrates with a small cost and space.

Description

technical field [0001] The present invention relates to a stocker and an automatic transfer vehicle for a hermetic type glass substrate cassette, and a liquid crystal display device manufacturing apparatus using these apparatuses, which can achieve saving at low cost and small space for manufacturing liquid crystal displays The space of the processing equipment group of the device can be reduced, the cost of the processing equipment can be reduced, and the adhesion of impurities to the glass substrate can be suppressed. Background technique [0002] Conventionally, in the production of liquid crystal display devices, in order to avoid the adhesion of impurities on the glass substrate as the raw material as much as possible, the glass substrate was stored in a sealed glass substrate box with an openable and closable cover for storage or processing. Transmission of device groups. [0003] Conventionally used hermetically sealed glass substrate cell image 3 The sliding box sh...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/13B65G49/06G02F1/1333
CPCB65G49/068B65G2249/02B65G49/061B65G2201/0235G02F1/1333
Inventor 铃木信博
Owner MITSUBISHI ELECTRIC CORP