Capacitive mems gyroscope and its method of speeding up the vibration
A gyroscope and capacitive technology, which is applied to capacitive MEMS gyroscopes and the field of accelerating the start-up speed, can solve the problems of increasing the chip cost, increasing the driving electrode, increasing the maximum withstand voltage of the circuit, etc., to speed up the start-up speed and cost. Low, easy-to-achieve effects
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[0026] In describing the embodiments of the present invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top ", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise" and other indicated orientations or positional relationships are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and Simplified descriptions, rather than indicating or implying that the device or element referred to must have a particular orientation, be constructed and operate in a particular orientation, and therefore should not be construed as limiting the invention. The attached drawings are schematic diagrams or conceptual diagrams, and the relationship between the thickness and width of each part, as well as the proportional relationship between each part, etc., are not completely consistent with their actual values.
[0027] figu...
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