Transfer equipment for carrying shelf with wafer boxes

Abstract

The invention provides transfer equipment for carrying a shelf with wafer boxes. The transfer equipment comprises transportation equipment and carrying equipment arranged above the transportation equipment, wherein the carrying equipment for carrying the shelf with the wafer boxes comprises a clamping mechanism, a sending-out mechanism and lifting mechanisms; the clamping mechanism is arranged above the sending-out mechanism; the sending-out mechanism can drive the clamping mechanism to move in the first direction; the lifting mechanisms are arranged on the two sides of the sending-out mechanism; and jacking platforms of the lifting mechanisms can push a grabbing mechanism in the clamping mechanism to ascend and descend in the second direction. According to the transfer equipment, a production area route does not need to be planned in advance at a time in the earlier stage of factory building, the planning is flexible, the track laying cost is saved, and meanwhile, when the route is changed according to the change in the position of process equipment of a factory, the transfer equipment can still complete wafer box conveying between storage equipment or between the storage equipment and other equipment.

Description

technical field [0001] The invention belongs to the technical field of semiconductors and relates to a transfer device for transferring wafer box shelves. Background technique [0002] At present, the semiconductor industry is facing the problem of increasing personnel costs. In order to reduce manpower and cost, it can also improve work efficiency and ensure safety. For this reason, factory automation is what companies are pursuing. Handling robots are an indispensable link in these industries. At present, semiconductors exist and are used in this industry with manual trolley handling and OHT handling (high-altitude lifting transport handling system). Manual handling needs to place the required materials on an ordinary trolley, and carry out the handling by pushing the trolley. Long-term personnel handling makes employees tired and laborious, and cannot maintain a fixed handling capacity all the time. OHT handles a single material handling, as far as OHT itself is concern...

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Problems solved by technology

[0003] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a transfer device for handling wafer cassette racks, which is used to solve the problem that the transfer system in the prior art has a single track and cannot be carried out when the position of the device is changed later. The handling problem of wafer box

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